Comet Ag

Comet Ag Plasma Control Technologies

Roland Schlierf

Manuel Vor Dem Brocke

Daniel Gruner

André Grede

Anton Labanc

Thomas Fink

Nikolai Schwerg

A method for generating an RF signal preferably for a plasma chamber including the steps of: generating an input RF signal on the basis of a first set of control parameters; detecting at least one distorted RF signal; synchronizing the at least one distorted RF signal with the input RF signal; determining a difference between a target RF signal and the at least one distorted RF signal being synchronized; if the difference is larger than a predetermined threshold, determining a second set of control parameters based on the comparison of the target RF signal and the at least one distorted RF signal being synchronized; and generating an adapted input RF signal on the basis of the second set of control parameters such that the difference between the target RF signal and the distorted RF signal is reduced.

Method for generating an RF signal, controller, RF generator and plasma apparatus

A radio-frequency generator, including a power amplifier module including a power amplifier, a pickup module connected to an output of the power amplifier to generate a pickup signal, and an output configured to be connected to the respective output of the amplifier and configured to output a radio-frequency output signal. The radio-frequency generator includes a measurement module configured to receive the pickup signal and to generate a measurement signal based on the one pickup signal; and a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide a drive signal as input to the power amplifier module, and a regulation module configured to receive the measurement signal, and to regulate the power of the radio-frequency output signal based on the measurement signal.

Radio frequency generator

A control unit for generating a plurality of synchronized radio frequency (RF) output signals (RF) each having a respective output frequency (f), phase (Φ), and amplitude (A), including The disclosure further describes a radio frequency (RF) power generator, an arrangement of at least two such radio frequency (RF) power generators, and a method each for generating a plurality of synchronized radio frequency (RF) output signals (RF).

Control unit, radio frequency power generator, and method for generating synchronized radio frequency output signals

A device for synchronizing a periodic high frequency power signal () and an external reference signal (). The device comprises a phase control circuit () and a digital oscillator circuit (). The digital oscillator circuit () is connected to the phase control circuit (). The digital oscillator circuit () comprises means for generating the periodic high frequency power signal () dependent on the control signal from the phase control circuit. The phase control circuit () is configured to determine a phase difference of the periodic high frequency power signal () and the external reference signal ().

Device and method for synchronizing a high frequency power signal and an external reference signal

The invention relates to a device for synchronizing a periodic high frequency power signal () and an external reference signal (). The device comprises a phase control circuit () and a digital oscillator circuit (). The digital oscillator circuit () is connected to the phase control circuit (). The digital oscillator circuit () comprises means for generating the periodic high frequency power signal () dependent on the control signal from the phase control circuit. The phase control circuit () is configured to determine a phase difference of the periodic high frequency power signal () and the external reference signal ().

The invention relates to a filter unit for filtering multiple pulse signals comprising a number of filter circuits, which are connected in parallel. Each filter circuit comprises an input and an output, wherein the input is configured to receive an amplitude of an input signal and the output is configured to activate an output signal. Each filter circuit has an allocated filter level and further comprises a pulse level detection circuit configured to detect a change of state of a pulse level of the input signal. The change of state comprises a transition from a first pulse level to a second pulse level and if the pulse level corresponds to the allocated filter level of the filter circuit the output of said filter circuit is activated.

Device and method for filtering multiple pulse signals

A method of frequency tuning an electrical generator for supplying electrical power to a plasma is provided. Also provided is a plasma processing system and a computer program product. The method, the electrical generator, the plasma processing system, and the computer program product may have the advantage that the stability of the plasma with respect to repeated and essentially identical high and low power pulses is used to reduce the controlling effort and to check the stability of the plasma process.

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Frechen, Germany

Roland Schlierf