Applied Materials, Inc.

Other

Apple Inc.

Roland R Smith

Jonathan L Hall

Troy Alexander Carter

Paul James Keas

Jacob L Dawson

Kartik Ramaswamy

Hamid Noorbakhsh

Chunlei Zhang

Sergio Fukuda Shoji

Haitao Wang

Brad L Mays

Shahid Rauf

Stephen Donald Prouty

Vladimir Knyazik

Denis M Koosau

Islam Mohsen Shawki

Matthew M Torok

Peteris K Augensberg

A motion control system includes a top mount, a bottom mount, a rigid housing, an air spring, and a linear actuator. The air spring transfers force of a first load path between the top mount and the bottom mount. The air spring includes a pressurized cavity containing pressurized gas that transfers the force of the first load path. The linear actuator transfers force of a second load path between the top mount and the bottom mount in parallel to the first load path. The rigid housing defines at least part of the pressurized cavity and transfers the force of the second load path.

Motion control system

A suspension system includes a top mount, a bottom mount, a rigid housing, an air spring, and a linear actuator. The air spring transfers force of a first load path between the top mount and the bottom mount. The air spring includes a pressurized cavity containing pressurized gas that transfers the force of the first load path. The linear actuator transfers force of a second load path between the top mount and the bottom mount in parallel to the first load path. The rigid housing defines at least part of the pressurized cavity and transfers the force of the second load path.

Active suspension system

A vehicle wheel assembly includes a wheel, a tire supported by the wheel, an internal space defined by the wheel, a wheel hub that is rotatably connected to the wheel and is located in the internal space, and a mass actuator that is connected to the wheel hub and located in the internal space.

Wheel-mounted suspension actuators

Embodiments of the present disclosure relate to a showerhead assembly for use in a processing chamber. The showerhead assembly includes a porous insert disposed in a space defined between a gas distribution plate and a base plate to moderate the corrosive radicals resulting from plasma ignition to reduce particle issues and metal contamination in the chamber. The porous insert is a conductive material, such as metal, used to reduce the gap electrical field strength, or may be a dielectric material such as ceramic, polytetrafluoroethylene, polyamide-imide, or other materials with a low dielectric loss and high electrical field strength under conditions of high frequency and strong electric fields. As such, the electrical breakdown threshold is enhanced. The porous insert may reduce and/or eliminate showerhead backside plasma ignition and may include multiple concentric narrow rings that cover gas holes of the gas distribution plate.

Showerhead with reduced backside plasma ignition

Implementations described herein provide a cooling base and a substrate support assembly having the same. In one example, a cooling base is provided that includes a body coupled to a cap. A plurality cooling channels are disposed in the body and bounded on at least one side by the cap. The plurality cooling channels have a polar array of spirals.

Cooling base with spiral channels for ESC

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Sunnyvale, CA, United States of America

Roland R Smith