Leybold Gmbh

Oerlikon Leybold Vacuum Gmbh

Oerlikon Leybold Vaccum Gmbh

Roland Müller

Thomas Dreifert

Wolfgang Giebmanns

Dirk Schiller

Robert Jenkins

Peter Birch

Max Pelikan

Daniel Schneidenbach

Dirk Stratmann

Magnus Janicki

Nils Olesen

Stefan Wolter

A screw vacuum pump comprises a housing forming a pumping chamber, wherein the housing is made of aluminum or an aluminum alloy. Further provided are two screw rotors arranged in the pumping chamber, each screw rotor comprising at least one displacer element having a helical recess for forming a plurality of windings, wherein the at least one displacer element is made of aluminum or an aluminum alloy. Between the region in which prevail 5% to 30% of the outlet pressure and a pressure-side end of the rotor (pump outlet), at least six, particularly at least eight, and with particular preference at least ten windings are provided.

Screw vacuum pump without internal cooling

A vacuum pump screw rotor, comprising at least two helical displacer elements on a rotor shaft. The at least two displacer elements have different pitches, but the pitches of each displacer element are constant. Furthermore, the displacer elements each have a helical recess, each having a contour that remains the same over its entire length. Hereby, a suction-side displacer element has a recess having an asymmetric contour, and a pressure-side displacer element has a recess having a symmetrical contour.

Vacuum pump screw rotors with symmetrical profiles on low pitch sections

A vacuum pump system for evacuating a chamber, in particular a lock or a process chamber, is provided that includes a main vacuum pump preferably configured as a screw pump. An inlet of the main vacuum pump is connected with the chamber to be evacuated. As seen in the feeding direction of the main vacuum pump an auxiliary vacuum pump is arranged which is in particular a Roots pump. An outlet area of the main vacuum pump is connected with a main outlet on the one hand and an inlet of the auxiliary vacuum pump on the other hand. Further, an outlet of the auxiliary vacuum pump is connected with the main outlet.

Vacuum pump system

A vacuum pump comprises pumping elements arranged in a pumping chamber. An electric motor drives the pumping element. A frequency inverter is provided for changing the rotational speed of the electric motor. The frequency inverter is arranged in a frequency inverter housing immediately connected to the pump housing. An air cooler and a liquid cooler are arranged in the frequency inverter housing to cool the frequency inverter.

Vacuum pump

A screw vacuum pump, in particular for compression against atmospheric pressure, comprises a pump housing defining a suction chamber. Two meshing screw rotors are arranged in the suction chamber. Further, an overpressure outlet provided, which comprises an overpressure opening in a side wall of the suction chamber. Further, an overpressure valve is arranged in the overpressure outlet. The width (b) of the overpressure opening in the longitudinal direction of the screw rotors is smaller than or equal to a tooth width (B) of the screw rotors.

Screw-type vacuum pump having overpressure openings

Growing community of inventors

Kö'ln, Germany

Roland Müller