Infineon Technologies Ag

Roland Meier

Rainer Leuschner

Bernhard Winkler

Kerstin Kaemmer

Marten Oldsen

Karolina Zogal

Klemens Pruegl

Raimund Foerg

Thomas Popp

Dirk Meinhold

Wolfram Langheinrich

Florian Brandl

Robert Gruenberger

Sebastian Luber

A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.

Sensor device including sensor unit for a gaseous medium

A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a semiconductor chip including a substrate having a first surface and a second surface arranged opposite to the first surface; at least one stress-decoupling trench that extends from the first surface into the substrate, where the at least one stress-decoupling trench extends partially into the substrate towards the second surface although not completely to the second surface; a microelectromechanical systems (MEMS) element, including a sensitive area, disposed at the first surface of the substrate and laterally spaced from the at least one stress-decoupling trench; and a stress-decoupling material that fills the at least one stress-decoupling trench and covers the sensitive area of the MEMS element.

Mechanical stress decoupling for microelectromechanical systems (MEMS) elements with gel-filling

Embodiments relate to microelectromechanical systems (MEMS) and more particularly to membrane structures comprising pixels for use in, e.g., display devices. In embodiments, a membrane structure comprises a monocrystalline silicon membrane above a cavity formed over a silicon substrate. The membrane structure can comprise a light interference structure that, depending upon a variable distance between the membrane and the substrate, transmits or reflects different wavelengths of light. Related devices, systems and methods are also disclosed.

Membrane structures for microelectromechanical pixel and display devices and systems, and methods for forming membrane structures and related devices

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Wuppertal, Germany

Roland Meier