Office National D'etudes Et De Recherches Aerospatiales

Onera (office National D'etudes Et De Recherches Aerospatiales)

Centre National De La Recherche Scientifique

Onera

Roger Valle

Pierre J Josso

Olivier Dessornes

Stéphan Megtert

Stéphane Landais

Fayçal Bouamrane

Thomas Bouvet

Bernard Genty

Alain Marraud

The invention relates to a process for fabricating a high-precision object made of at least one inorganic material, comprising the following steps: using a high-resolution photolithography process, employing X-rays or UV rays depending on the desired degree of precision, in a chosen direction Z, to form a negative mold, which does not deform at the microscale during the steps of the process, in a material able to withstand a step for forming the object by dry deposition and capable of either being removed without altering the object fabricated or being separated from said object; choosing, independently of the normal redox potential of its constituent elements, at least one inorganic material from the set of materials that can be deposited by dry deposition and that allow the object to be fabricated to meet its thermomechanical and environmental specifications; and forming, by means of the non-deformable negative mold, the object to be fabricated by dry deposition of said at least one inorganic material, thereby allowing an object to be fabricated with better than microscale precision, especially with respect to the angle between the walls generated by the dry deposition and said direction Z. The invention is preferably applied to the fabrication of high-precision micromechanical objects, in particular in the aeronautical and clock-/watch-making fields.

Process for fabricating high-precision objects by high-resolution lithography and dry deposition and objects thus obtained

The device includes a support tube passing through the wall of the column of the microscope, whose inner end is supported on an inner structure of the microscope by a hemispherical surface. This is supported in the wall around the orientation axis and is connected to the sample-holder which it traverses by control means enabling the position of the sample-holder to be adjusted in the support tube along three axes of a reference dihedral. The control means comprise an annular diaphragm for suspending the sample-holder in the support tube close to the center of the support surface. Lever and push-rod connecting linkages of high stiffness enable the sample-holder to be tilted around the center of the diagram in two perpendicular planes.

Device for adjusting the position and the orientation around an axis of

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Clamart, France

Roger Valle