Veeco Instruments Inc.

Other

Roger P Fremgen, Jr

Alan V Hayes

Emmanuel N Lakios

Victor Kanarov

Abraham J Navy

John Jacob

Genrikh Treyger

Edward W Ostan

Piero Sferlazzo

Boris L Druz

Robert C Krause

Viktor Kanarov

Ira Reiss

Method and apparatus for processing a substrate with an energetic particle beam. Features on the substrate are oriented relative to the energetic particle beam and the substrate is scanned through the energetic particle beam. The substrate is periodically indexed about its azimuthal axis of symmetry, while shielded from exposure to the energetic particle beam, to reorient the features relative to the major dimension of the beam.

Method and apparatus for surface processing of a substrate using an energetic particle beam

A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam &ldquo;on&rdquo; and beam &ldquo;off&rdquo; states is presented. The process and control system provide very precise control of the duration of the charged-particle extraction.

Charged-particle source, control system and process using gating to extract the charged particle beam

A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam 'on' and beam 'off' states is presented. The process and control system provide very precise control of the duration of the charged-particle extraction.

Charged-particle source, control system, and process using gating to

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East Northport, NY, United States of America

Roger P Fremgen, Jr