Better Semiconductor Processes (bsp)

Roger L Baeten

Richard E Tressler

Joseph Stach

An improved semiconductor wafer handling system completely eliminates the need for boats, sleds, paddles, wheeled carriers, etc., customarily employed in transporting wafers during heat processing through the use of a plurality of rigid, polished cantilevered rods having a multiplicity of spaced slots for cooperatively holding wafers in an upright position. The system provides a means for achieving higher production yields of such semiconductor elements by generating fewer contaminating particles and through less exposure to ambient environment.

Growing community of inventors

State College, PA, United States of America

Roger L Baeten