Asylum Research Corporation

Oxford Instruments Afm Inc

Oxford Instruments, Inc.

Oxford Instruments Asylum Research Inc

Roger Callahan

Roger B Proksch

Jason Paul Cleveland

Jason Bemis

Ted Limpoco

Frank Stetter

Sophia Hohlbauch

Nicholas Geiss

Sophia Hohlbach

Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.

Material property measurements using multiple frequency atomic force microscopy

Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.

Automated atomic force microscope and the operation thereof

Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.

Variable density scanning

Material property measurements using multiple frequency atomic fore microscopy

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Goleta, CA, United States of America

Roger Callahan