Average Co-Inventor Count = 11.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asml Netherlands B.v. (1 from 4,902 patents)
2. Carl-Zeiss-Smt Ag (1 from 461 patents)
1 patent:
1. 7473907 - Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination