Globalfoundries U.S. Inc.

Globalfoundries Inc.

Advanced Micro Devices Corporation

Khalifa University

Roderick Alan Augur

Yusheng Bian

Michal Rakowski

Karen A Nummy

Kenneth John Giewont

Jason Eugene Stephens

Won Suk Lee

Xunyuan Zhang

Asif J Chowdhury

Robert J Fox, Iii

Alec Hammond

Steven M Shank

Hoon Sik Kim

Sunil Kumar Singh

Marc Laurent Tarabbia

Jeannine Madelyn Trewhella

Nicholas A Polomoff

Craig Child

Alexander Lee Martin

Dewei Xu

Nader Magdy Hindawy

Il Goo Kim

Seung-Yeop Kook

Kevin M Boyd

Chanro Park

Ajey Poovannummoottil Jacob

Steven C Avanzino

Andy C Wei

Guillaume Bouche

Mahbub Rashed

Suresh Venkatesan

Errol Todd Ryan

Edward William Kiewra

Yi Qi

Shibly S Ahmed

Subramani Kengeri

Lei Sun

Robert Fox

Xiang Hu

Ming He

Larry Zhao

Linus Jang

Bo Peng

Kevin K Dezfulian

Mark Alexander Zaleski

Akshey Sehgal

Yunfei Deng

Domingo A Ferrer

Abdelsalam A Aboketaf

Yuansheng Ma

Irene Y Lin

Sujith Chandran

Lili Cheng

Jaime Viegas

David Michael Permana

Tung-Hsing Lee

Shyam Pal

Anvitha Shampur

Yongsik Moon

Petar I Todorov

Anbu Selvam K M Mahalingam

Yuan Lei

Jihong Choi

Alamgir M Arif

Jongwook K E

Eden Zielinski

Thomas G Weeks, Iii

Siva R K Dangeti

Marios Papadovasilakis

Yonas Gebregiorgis

Structures for an optical power splitter and methods of forming a structure for an optical power splitter. The structure comprises a spiral waveguide core having an outer perimeter. The structure further comprises a plurality of waveguide cores. Each waveguide core has a section disposed adjacent to the outer perimeter of the spiral waveguide core.

Optical power splitters incorporating one or more spiral elements

Structures for an edge coupler and methods of forming a structure for an edge coupler. The structure includes a waveguide core over a dielectric layer, and a back-end-of-line stack over the waveguide core and the dielectric layer. The back-end-of-line stack includes an interlayer dielectric layer, a side edge, a first feature, a second feature, and a third feature laterally arranged between the first feature and the second feature. The first feature, the second feature, and the third feature are positioned on the interlayer dielectric layer adjacent to the side edge, and the third feature has an overlapping relationship with a tapered section of the waveguide core.

Metamaterial edge couplers in the back-end-of-line stack of a photonics chip

A laser structure, including: a dielectric matrix formed of a first material; a laser source formed within the dielectric matrix and formed of a semiconductor material; and a plurality of side confining features formed within the dielectric matrix and extending parallel to and along a length of the laser source. The plurality of side confining features are formed of the semiconductor material.

Confining features for mode shaping of lasers and coupling with silicon photonic components

A photonic integrated circuit (PIC) die includes a silicon nitride optical component over an active region. Multiple interconnect layers are over the silicon nitride optical component, each of the multiple interconnect layers including a metal interconnect therein. At least one optical deflector is over the multiple interconnect layers and over the silicon nitride optical component. The optical deflector(s) may also include a contact passing therethrough to the interconnect layers, but do not include any other electrical interconnects. Each optical deflector may deflect light within an ambient light range of less than 570 nanometers (nm) to protect the silicon nitride optical component from light-induced degradation.

PIC die with optical deflector for ambient light

The present disclosure relates to semiconductor structures and, more particularly, to top electrode interconnect structures and methods of manufacture. The structure includes: a lower metallization feature; an upper metallization feature; a bottom electrode in direct contact with the lower metallization feature; one or more switching materials over the bottom electrode; a top electrode over the one or more switching materials; and a self-aligned via interconnection in contact with the top electrode and the upper metallization feature.

Top electrode interconnect structures

Disclosed is a photonic integrated circuit (PIC) structure including: a first waveguide with a first main body and a first end portion, which is tapered; and a second waveguide with a second main body and a second end portion, which has two branch waveguides that are positioned adjacent to opposing sides, respectively, of the first end portion of the first waveguide and that branch out from the second main body, thereby forming a V, U or similar shape. The arrangement of the two branch waveguides of the second end portion of the second waveguide relative to the tapered first end portion of the first waveguide allows for mode matching conditions to be met at multiple locations at the interface between the waveguides, thereby creating multiple signal paths between the waveguides and effectively reducing the light signal power density along any one path to prevent or at least minimize any power-induced damage.

Photonic integrated circuit structure with a tapered end portion of one waveguide adjacent to a v-shaped end portion of a different waveguide

Embodiments of the disclosure provide an integrated circuit (IC) structure. With capacitor electrodes in different ILD layers. The structure includes a first inter-level dielectric (ILD) layer having a top surface, a first vertical electrode within the first ILD layer, a capacitor dielectric film on a top surface of the first vertical electrode, a second ILD layer over the first ILD layer, and a second vertical electrode within the second ILD layer and on the capacitor dielectric film. The capacitor dielectric film is vertically between the first vertical electrode and the second vertical electrode.

Integrated circuit structure with capacitor electrodes in different ILD layers, and related methods

Structures including an edge coupler and methods of forming a structure including an edge coupler. The structure includes a waveguide core over a dielectric layer and a back-end-of-line stack over the dielectric layer and the waveguide core. The back-end-of-line stack includes a side edge and a truncated layer that is overlapped with a tapered section of the waveguide core. The truncated layer has a first end surface adjacent to the side edge and a second end surface above the tapered section of the waveguide core. The truncated layer is tapered from the first end surface to the second end surface.

Edge couplers in the back-end-of-line stack of a photonics chip

Structures including an optical coupler and methods of fabricating a structure including an optical coupler. The structure includes a substrate, a first dielectric layer on the substrate, and an optical coupler having a first grating and a second grating. The first grating has a first plurality of segments positioned in a first level over the first dielectric layer. The second grating has a second plurality of segments positioned in a second level over the first dielectric layer. The second level differs in elevation above the first dielectric layer from the first level. The second plurality of segments are positioned in the second level to overlap with the first plurality of segments of the first grating, and the second plurality of segments comprise a metal. A second dielectric layer is positioned in a vertical direction between the first level and the second level.

Optical couplers including a back-end-of-line grating

Embodiments of the disclosure provide an optical ring modulator. The optical ring modulator includes waveguide with a first semiconductor material of a first doping type, and a second semiconductor material having a second doping type adjacent the first semiconductor material. A P-N junction is between the first semiconductor material and the second semiconductor material. A plurality of photonic crystal layers, each embedded within the first semiconductor material or the second semiconductor material, has an upper surface that is substantially coplanar with an upper surface of the waveguide structure.

Optical ring modulator with photonic crystal

Structures for a wavelength-division multiplexing filter and methods of forming a structure for a wavelength-division multiplexing filter. A waveguide core of the wavelength-division multiplexing filter includes a first bend having a first curvature and a second bend having a second curvature different than the first curvature. The structure further includes a waveguide core region having a first end surface, a second end surface, and a bend arranged between the first and second end surfaces. The bend is positioned over the first bend of the waveguide core in an overlapping relationship.

Wavelength-division multiplexing filters including assisted coupling regions

Disclosed are a system, method, software tool, etc. for generating a layout indicating the paths for balanced optical waveguides (WGs) of a WG bus. A grid is used to route paths, which extend between corresponding first and second input/output nodes, respectively, and which are within boundaries of a defined area. The paths are automatically rerouted to balance for length and number of bends without overly increasing the lengths of or number of bends in those paths and further without moving the input/output nodes or falling outside the established boundaries. Automatic rerouting of the paths is performed iteratively based on results of various intersection operations related to different path-specific sets of points on the grid to determine when and where to insert additional linear segments and bends into the paths. Then, a layout indicating the balanced paths is generated. Also disclosed is a WG bus structure with balanced optical WGs.

Waveguide bus with balanced optical waveguides and method, system, and software tool for automatic generation of a layout for the waveguide bus

Structures including a grating coupler and methods of forming a structure that includes a grating coupler. The grating coupler includes segments that are spaced along a longitudinal axis. Each segment is inclined relative to the longitudinal axis. Each segment includes a first curved section having a first curvature and a second curved section having a second curvature that is inverted relative to the first curvature.

Grating couplers with segments having sections of inverted curvature

Growing community of inventors

Saratoga Springs, NY, United States of America

Roderick Alan Augur