Nikon Corporation

Hgst Netherlands, B.v.

Rocky Mai

Jr-Yi Shen

Charles Allan Brown

Alex Ka Tim Poon

Pai-Hsueh Yang

John Martin Burns

Gaurav Keswani

Charles E Hignite

Clayton Paul Henderson

Sandy Lee

Ricardo German Duque

Yeong-Jun Choi

A stage assembly () includes a stage (), and a fluid actuator assembly () that moves the stage (). The fluid actuator assembly () includes a piston housing () that defines a piston chamber (); (ii) a piston () that separates the piston chamber () into a first chamber (A) and a second chamber (B); (iii) a supply valve (C) that controls the flow of the working fluid () into the first chamber (A); and (iv) an exhaust valve (D) that controls the flow of the working fluid () out of the first chamber (A). The supply valve (C) has a supply orifice (G) having a supply orifice area, and the exhaust valve (D) has an exhaust orifice (G) having an exhaust orifice area. Moreover, the supply orifice area is different from the exhaust orifice area. Further multiple valves of different sizes can be used in combination for the supply and exhaust for each chamber (A), (B).

Dual valve fluid actuator assembly

A particle-capturing device. The particle-capturing device includes a component having a surface that is configured to be disposed inside an enclosure, and is configured to make contact with an air-stream carrying particles within the enclosure. The component includes an electrostatic particle-capturing portion that includes a dielectric electrically insulating portion, and a plurality of charged portions. The charged portions are embedded in the dielectric electrically insulating portion, and are configured to generate an electrostatic field coupled with the surface that captures the particles from a flow of the air-stream and confines the particles at the surface. In addition, the component is configured to provide at least one additional function within the enclosure exclusive of capturing particles.

Particle-capturing device including a component configured to provide an additional function within an enclosure exclusive of capturing particles

Growing community of inventors

San Mateo, CA, United States of America

Rocky Mai