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Laser Fusion Technologies Ltd.

The Provost, Fellows, Foundation Scholars, and the Other Members of Board, of the College of the Holy and Undivided Trinity of Queen Elizabeth Near Dublin

Rocco Lupoi

William O'Neill

Martin Sparkes

Andrew Cockburn

Anthony James Robinson

Matthew Bray

A thermal structure for dissipating heat from a semiconductor substrate has a semiconductor substrate having an external surface which may be roughened. An optional base layer comprising aluminium is formed on top of the external surface by a cold spraying process, and a top layer comprising a matrix of copper and diamond is formed above the substrate, and above the base layer if present, by cold spraying a powder mixture of copper and diamond particles. The top layer is thereby created as a matrix of copper formed by the deformation of the copper particles on impact with the underlying surface and a dispersed phase comprising the diamond particles embedded within the copper matrix. The resulting structure has high thermal conductivity and a coefficient of thermal expansion that is well matched to the substrate, and eliminates the need for a thermal interface material or paste.

Thermal structures for dissipating heat and methods for manufacture thereof

A process and apparatus are disclosed for the deposition of a layer of a first material onto a substrate of a second material. Powder particles of the first material are entrained into a carrier gas flow to form a powder beam directed to impinge on the substrate. This defines a powder beam footprint region at the substrate. The powder beam and the substrate are moved relative to each other to move the powder beam footprint relative to the substrate, thereby to deposit the layer of the first material. A laser is operated to cause direct, local heating of at least one of a forward substrate region and a powder beam footprint region. The laser beam direction is defined with reference to a plane coincident with or tangential to a surface of the substrate at the center of the laser beam footprint in terms of an elevation angle from the plane to the laser beam direction and in terms of an acute azimuthal angle from the movement direction to the laser beam direction. The elevation angle is 80&#xb0; or less and the azimuthal angle is &#xb1;60&#xb0; or less. In the apparatus, there are provided at least three laser sources arrayed around the powder beam footprint, the angular spacing between the laser sources being 120&#xb0; or less.

Deposition of coatings on substrates

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Dublin, Ireland

Rocco Lupoi