Alta Devices, Inc.

Utica Leaseco, LLC

Robindranath Banerjee

Brian J Brown

Christopher L Beaudry

Stephen M Fisher

A method and system for polishing a plurality of workpieces is disclosed. The method and system comprises providing a polishing tool with multiple polishing heads; and providing a substrate tray that can hold the plurality of work pieces in a fixed position on a tray underneath the polishing heads. The system and method includes moving the tray within the polisher. Finally, the method and system includes configuring the multiple polishing heads with the appropriate pad/slurry combinations to polish the workpieces and to create a finished polished surface on the plurality of work pieces.

Growing community of inventors

San Jose, CA, United States of America

Robindranath Banerjee