Asm IP Holding B.v.

Robin Scott

Matthew G Goodman

Xing Lin

Alexandros Demos

Junwei Su

Wentao Wang

Caleb Miskin

Amir Kajbafvala

Rutvij Naik

Shujin Huang

Robinson James

Youness Alvandi-Tabrizi

A susceptor has a circular pocket portion, an annular ledge portion, and an annular rim ledge portion. The circular pocket portion is arranged along a rotation axis and has a perforated surface. The annular ledge portion extends circumferentially about pocket portion and has ledge surface that slopes axially upward from the perforated surface. The rim portion extends circumferentially about the ledge portion and is connected to the pocket portion by the ledge portion of the susceptor. The susceptor has one or more of a tuned pocket, a contact break, a precursor vent, and a purge channel located radially outward of the perforated surface to control deposition of a film onto a substrate supported by the susceptor. Semiconductor processing systems, film deposition methods, and methods of making susceptors are also described.

Susceptors with film deposition control features

Growing community of inventors

Phoenix, AZ, United States of America

Robin Scott