Taiwan Semiconductor Manufacturing Comp. Ltd.

Robin Hsieh

Ruey-Hsin Liu

Shun-Liang Hsu

Chen-Bau Wu

Chien-Shao Tang

Tsung-Yi Huang

Tsai Chun Lin

Pai-Kang Hsu

Albert Yao

A transistor suitable for high-voltage applications is provided. The transistor is formed on a substrate having a deep well of a first conductivity type. A first well of the first conductivity type and a second well of a second conductivity type are formed such that they are not immediately adjacent each other. The well of the first conductivity type and the second conductivity type may be formed simultaneously as respective wells for low-voltage devices. In this manner, the high-voltage devices may be formed on the same wafer as low-voltage devices with fewer process steps, thereby reducing costs and process time. A doped isolation well may be formed adjacent the first well on an opposing side from the second well to provide further device isolation.

High voltage CMOS devices

A semiconductor structure includes a first well region of a first conductivity type overlying a substrate, a second well region of a second conductivity type opposite the first conductivity type overlying the substrate and laterally adjoining the first well region, a third well region of the second conductivity type adjacent and spaced apart from the first well region, a first deep well region of the second conductivity type underlying at least portions of the first and the second well regions, a second deep well region of the second conductivity type underlying the third well region and spaced apart from the first deep well region, an insulation region in the first well region, a gate dielectric extending from over the insulation region to over the second well region, and a gate electrode on the gate dielectric.

LDPMOS structure with enhanced breakdown voltage

Growing community of inventors

Hsinchu, Taiwan

Robin Hsieh