Cavendish Kinetics Limited

Qorvo Us, Inc.

Roberto Gaddi

Robertus Petrus Van Kampen

Richard Lee Knipe

Anartz Unamuno

Paul Anthony Tornatta, Jr

Ray Myron Parkhurst

Charles Gordon Smith

Vikram Joshi

Chenhui Niu

James D Huffman

Lance W Barron

Rashed Mahameed

Chih-Hao Hsu

Ramadan A Alhalabi

Toshiyuki Nagata

Lars Ernst Johnsson

Cornelius Petrus Elisabeth Schepens

Charles G Smith

A microelectromechanical system (MEMS) switch includes a movable beam suspended over a first set of conductive contacts and a second set of conductive contacts. Actuation of the MEMS switch occurs in two stages. During actuation of the MEMS switch, the movable beam is brought into contact with the first set of conductive contacts in a first stage of actuation. A first conduction path is created when the movable beam contacts the first set of conductive contacts. Continued actuation of the MEMS switch causes the movable beam to contact the second set of conductive contacts in a second stage of actuation. A second conduction path is created when the movable beam contacts the second set of conductive contacts.

Two-stage actuation in MEMS ohmic relays

An electrical arrangement for performing radio frequency isolation for microelectromechanical relay switches. A microelectromechanical relay switch comprises a beam configured to switch from a first position connected to an upper voltage source to a second position connected to a lower voltage source. The microelectromechanical relay switch further comprises at least one frequency isolation circuit or resistor disposed adjacent to the beam. The at least one frequency isolation circuit or resistor biases a direct current potential to allow for electrostatic actuation and further provides a path for transient electrical currents during switching.

MEMS relay architecture with frequency isolation

The disclosure is directed to microelectromechanical system (MEMS) switches with multiple pull-down electrodes between terminal electrodes to limit off-state capacitance. In exemplary aspects disclosed herein, a plurality of pull-down electrodes are positioned between the input terminal electrode and the output terminal electrode. The plurality of pull-down electrodes are offset from each other to limit off-state capacitance between the input terminal electrode and the output terminal electrode. The separation between the pull-down electrodes disrupts the off-state capacitive path between the input terminal electrode and the output terminal electrode, thereby further insulating the contacts from each other. Limiting off-state capacitance reduces on-state electrical loss and increases off-state electrical isolation for improved performance.

MEMS switch with multiple pull-down electrodes between terminal electrodes

Mems switch with multiple pull-down electrodes between terminal electrodes

The present disclosure generally relates to the combination of MEMS intrinsic technology with specifically designed solid state ESD protection circuits in state of the art solid state technology for RF applications. Using ESD protection in MEMS devices has some level of complexity in the integration which can be seen by some as a disadvantage. However, the net benefits in the level of overall performance for insertion loss, isolation and linearity outweighs the disadvantages.

ESD protection of MEMS for RF applications

Unwanted or parasitic capacitances may occur in MEMS switches. To reduce or eliminate the impact of the unwanted or parasitic capacitance, an extra device, such as a second MEMS switch, may be coupled to a first MEMS switch to divert the unwanted or parasitic capacitance to ground.

High isolation series switch

The present disclosure generally relates to a MEMS device for reducing ESD. A contacting switch is used to ensure that there is a closed electrical contact between two electrodes even if there is no applied bias voltage.

Naturally closed MEMs switch for ESD protection

The present invention generally relates to a MEMS DVC utilizing one or more MIM capacitors. The MIM capacitor may be disposed between the MEMS device and the RF pad or the MIM capacitor may be integrated into the MEMS device itself. The MIM capacitor ensures that a low resistance for the MEMS DVC is achieved.

DVC utilizing MEMS resistive switches and MIM capacitors

The present invention generally relates to cellular phones having multiple antennas. The invention relates to how two antennas in a diversity or MIMO antenna system interact through mutual coupling. The mutual coupling is due to proximity of the two antennas, their antenna pattern and efficiency. The performance of the system can be optimized by adjusting the mutual coupling between the antennas. The primary and secondary antennas can be 'tuned' and 'de-tuned' respectively to enhance system performance. In this invention, the primary and secondary antennas are tuned independently using MEMS capacitor configured in the antenna aperture for frequency tuning.

Antenna efficiency enhancement by active detuning of diversity antenna

The present disclosure generally relates to any device capable of wireless communication, such as a mobile telephone or wearable device, having one or more antennas. By applying a variable reactance (capacitive or inductive component) antenna aperture tuner within a simple, scalar antenna aperture tuning system, the maintenance of a constant antenna resonant frequency in the presence of environmental changes or head/hand effects is obtained. The variable reactance is used to adjust the resonant frequency of the antenna to stay at the desired target frequency in response to external variables that would otherwise shift the resonance away from the operating frequency of the device. Adjusting the resonant frequency of the antenna in response to externally induced changes maintains the radiating efficiency of the antenna and simultaneously avoids impedance mismatch between the antenna and the respective transmit/receive path in the radio, thereby minimizing transmission losses.

Method and apparatus of maintaining constant antenna resonant frequency and impedance match in the presence of environmental changes and head/hand effect using variable reactance antenna aperture tuners

The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.

Merged legs and semi-flexible anchoring having cantilevers for MEMS device

The present disclosure generally relates to a MEMS DVC utilizing one or more MIM capacitors located in the anchor of the DVC and an Ohmic contact located on the RF-electrode. The MIM capacitor in combination with the ohmic MEMS device ensures that a stable capacitance for the MEMS DVC is achieved with applied RF power.

DVC utilizing MIMS in the anchor

The present invention generally relates to small antennas suitable for mobile devices operating in the high frequency and radio frequency bands in the range 100 MHz to 5 GHz. The antennas may be coupled to a DVC such as a MEMS DVC. The antenna may be coupled to a printed circuit board disposed inside of the mobile device, such as a mobile phone or smart phone.

Techniques of tuning an antenna by weak coupling of a variable impedance component

In a MEMS device, the manner in which the membrane lands over the RF electrode can affect device performance. Bumps or stoppers placed over the RF electrode can be used to control the landing of the membrane and thus, the capacitance of the MEMS device. The shape and location of the bumps or stoppers can be tailored to ensure proper landing of the membrane, even when over-voltage is applied. Additionally, bumps or stoppers may be applied on the membrane itself to control the landing of the membrane on the roof or top electrode of the MEMS device.

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's-Hertogenbosch, Netherlands

Roberto Gaddi