Varian, Inc.

Varian Associates, Inc.

Roberto Cerruti

Silvio Giors

Giampaolo Levi

A pumping stage for a vacuum pump, has an improved geometry allowing an optimum trade-off to be achieved between the exhaust pressure and the pumping rate attained in that stage. In the pumping stage () the axial extension that is the height of the pumping channel () varies along the circumference of the channel () between the inlet port () and the outlet port ().

Pumping stage for a vacuum pump

A turbomolecular vacuum pump ( ) comprises a first pumping section ( ) having pumping stages with bladed rotor discs, a second pumping section ( ) having pumping stages with smooth rotor discs, a third pumping section ( ) having a pumping stage with a toothed rotor disc ( ), and a fourth pumping section ( ) of the ejector or venturi pump type. (FIG. )

Vacuum pump

The present invention relates to a rotor of a vacuum pump comprising a rotatable shaft and a plurality of spaced apart parallel rotor disks secured to said rotatable shaft, such rotor being provided with a corrosion-resistant protective coating formed by a layer of polymeric material. The protective coating of the present invention may apply to any of the stationary or rotational parts which are disposed within a pump body and may be exposed to corrosive gases.

Rotor for turbomolecular pump

The present invention relates to a rotor of a vacuum pump comprising a rotatable shaft and a plurality of spaced apart parallel rotor disks secured to said rotatable shaft, such rotor being provided with a corrosion-resistant protective coating formed by a layer of polymeric material.

A turbomolecular pump comprises a pump body housing a gas inlet and a gas exhaust port and a plurality of pumping assemblies with interleaved rotors and stators located within the pump body. The rotors are secured to a rotating shaft that is supported by at least one rotatable support and driven by a motor. At least one stator of the pumping assemblies is provided with at least one spiral channel adapted to push and eject the gases from an area proximal to the shaft toward an area distal from the shaft and vice versa.

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Turin, Italy

Roberto Cerruti