Varian, Inc.

Agilent Technologies, Inc.

Roberto Carboneri

Giuseppe De Palma

Sandro Vittozzi

Silvio Giors

Mario Busso

Andrea Lepore

Andrea Bertallot

David Lukman

Pascal Martin

Christian Spada

A vacuum pumping system includes a vacuum pump and a motor for driving the vacuum pump. A motor stator and a motor rotor are received in a pumping chamber of the vacuum pump. Thanks to such arrangement, the vacuum pumping can be made as a single, sealed unit and the need for dynamic seals can be avoided. Moreover, the vacuum pumping system can be more compact and lighter than prior vacuum pumping systems. A pump rotor of the vacuum pump may be at least partially made as a hollow body, and the motor may be received inside the pump rotor.

Vacuum pumping system comprising a vacuum pump and its motor

A vacuum pumping system includes a plurality of positive displacement vacuum pumps, and more particularly a plurality of positive displacement vacuum pumps working in parallel. The vacuum pumping system includes a management unit that carries out a synchronized control of all the positive displacement vacuum pumps of the vacuum pumping system and thus allows to check possible risk of contamination of the vacuum pumping system and carry out, if needed, the necessary corrective actions without requiring any modification to the construction of the vacuum pumping system.

Vacuum pumping system having a plurality of positive displacement vacuum pumps and method for operating the same

An oil rotary vacuum pump of mechanical type is filled with a requested amount of oil at the end of the manufacturing process, then it is stored and then shipped to the user, letting the user avoid an operation of introducing the proper amount of oil into the pump. The oil leakage is prevented by securing the suction and/or exhaust ports of the pump, which are sealed by means of a removable sealing member, for instance by means of a membrane.

Oil rotary vacuum pump and manufacturing method thereof

An oil mechanical vacuum pump, which is equipped with an electric motor comprises an electronic control device for supplying the electric motor with power. The electronic control device comprises a frequency converter for controlling the excitation frequency Fof the voltage signal Sby which the motor is powered as a function of at least one operating parameter of the pump and of at least one threshold value that can be modified depending on the operating conditions of the pump.

Vacuum pumping device with electronic control of the motor

A device and a method provide a detection of a presence of a test gas. The device comprises a vacuum chamber connected to a vacuum pump equipped with an electronic power supply unit. At least one portion of the chamber is separated from a surrounding outside environment by a membrane selectively permeable to the test gas. A gas flow from the outside environment is guided forcefully over the surface of the membrane via a flow conveyor, which comprises an inlet duct, a diffuser and an outlet duct. The presence of any test gas is detected by the changes in the electrical current to the vacuum pump provided by the power supply.

Device and method for detecting the presence of test gas

An oil rotary vacuum pump of mechanical type () is filled with a requested amount of oil at the end of the manufacturing process, then it is stored and then shipped to the user, letting the user to avoid an operation of introducing the proper amount of oil into the pump. The oil leakage is prevented by securing the suction and/or exhaust ports () of the pump, which are sealed by means of a removable sealing member, for instance by means of a membrane ().

A gas-selective permeable membrane () utilisable in a leak detector for a gas, more particularly helium, comprising a sheet-like body () on which at least one reduced thickness area () is defined by removing a material from the sheet-like body. This at least one reduced thickness area () being permeable to at least one gas and formed so as that it is partly surrounded by a thicker and substantially gas-impermeable area () ensuring the structural strength of the membrane.

Gas-selective permeable membrane and method of manufacturing thereof

A leak detector comprises a high vacuum envelope connected with a vacuum pump to bring the vacuum envelope to a pressure sensibly lower than ambient pressure. At least a portion of the envelope is separated from an external environment through a quartz membrane associated with an electrical resistor, which heats the membrane to a sufficient temperature in order to make it permeable to a corresponding test gas (in particular, helium). In operation, an electronic control unit detects variations in the current absorbed by the vacuum pump and consequently signals the test gas diffusion into the chamber and hence the existence of a leak. A sampling line with a sampling pump disposed therein is connected to a probe for the intake of gas directed to expose to the membrane. The gas is discharged to the outside through a discharge line. A system for switching between the gas intake and exhaust is provided, in order to quickly eliminates any test gas trace from said detector. Purging cycle actuation is provided manually or automatically.

Leak detector

A turbine pump has a transition chamber ( ), which separates a low-pressure section ( B) from a high-pressure section ( A) and into which an additional inlet port ( ) opens. The chamber ( ) is defined by a stator stage ( ) consisting of a disc ( ) with a peripheral edge ( ), integral with said disc ( ) and forming a spacer ring integrated into the stator stage, and with radial blades ( ) joined with the disc ( ) at both ends.

Turbine pump with a stator stage integrated with a spacer ring

The method uses electrical discharge machining to form, onto a disc ( ) belonging to a stator ( ) of a turbine pump, radial blades ( ) joined to the disc at both ends and separated by very narrow channels ( ). To form the blades, a workpiece ( ) is exposed to a tool ( ) having a circular edge ( ) whose radius corresponds with an external radius of the blades. The tool is provided along its edge with at least one tongue-shaped elongated member ( ) joined at one end to the tool plate ( ) and extending along said edge ( ) in an inclined plane. Due to a relative combined rotation and translation motion between the tool and the workpiece, at least one channel ( ) with shape, size and inclination corresponding with those of the tongue element ( ) is produced in the workpiece.

Growing community of inventors

Turin, Italy

Roberto Carboneri