Hughes Aircraft Company

Robert Y Scapple

John W Peters

Jacques F Linder

Richard P Himmel

Robert G Grieger

Edward M Yee

Frank S Keister

Frank Z Keister

An apparatus for photochemical vapor deposition includes an outer reactor shell and a concentric inner shell which define a photochemical reaction zone. A radiation source is centrally located within the transparent inner shell, which isolates the radiation source from the vapor phase reactants present in the reaction zone. A rotating gas manifold is located within the reaction zone to uniformly distribute the vapor phase reactants within the reaction zone. Protective liquid is continually applied to the outer surface of the inner shell and spread into a thin film by wiper blades, to prevent deposition of reaction products onto the outer wall of the inner shell. The central location of the radiation source, along with the protective liquid film, make optimum usage of the reaction-inducing radiation generated by the radiation source. In addition, the rotating gas manifold promotes uniform deposition of layers of selected materials on substrates placed within the reaction zone.

Barrel reactor and method for photochemical vapor deposition

Method for photochemical vapor deposition

A ceramic substrate includes a multiplicity of alternately screened and fired conductor and dielectric levels, with interconnections between levels through small via holes in the dielectric layers or alternately by means of crossovers. Thick film resistors are incorporated throughout the ceramic substrate, wherever needed, and the thick film resistors are printed and trimmed through windows which extend through any upper layers. In addition, resistors may be printed directly on top of the dielectric layers where necessary. Selective area hermetic sealing is utilized only for those chips and wire bonds which require environmental protection by placement of a ring frame seal encircling the selected area and over insulation on substrate conductors which are routed directly beneath the sealing area. A lid is directly soldered to the frame and, before final sealing, a proper environment is created within a sealed area. Where equivalent chip versions of electronic components are not available, discrete components are soldered directly to the ceramic substrate outside of the sealed area. Necessary thermal dissipation can be afforded by direct mounting of the multilevel substrate on a heat sink.

Large area hybrid microcircuit assembly

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Los Angeles, CA, United States of America

Robert Y Scapple