Micro-epsilon Messtechnik Gmbh & Co. Kg

Inb Vision Ag

Micro-epsilon Messetechnik Gmbh

Robert Wagner

Rainer Hesse

Wolfram Schmidt

Hannes Loferer

Karl Wisspeintner

Tilo Lilienblum

Bernd Michaelis

Günter Schallmoser

Josef Reitberger

Erik Lilienblum

Reiner Kickingereder

Stephan Zweckinger

Hagen Wiest

Josef Hochleitner

A method of optically measuring a surface of a measurement object is disclosed. The method includes generating image light having an image pattern, projecting the generated image light onto the measurement object, and recording influenced light having an influenced image pattern. The image light is generated by an image generation device and the influenced light is captured by a capturing device. The influenced light is light that is reflected, scattered, diffracted, and/or transmitted by the measurement object based on interaction of the image light with the measurement object. The method further includes applying a correcting function to the image light. The correction function alters the image light such that the influenced image pattern recorded by the capturing device shows temporally and/or locally an at least approximately constant and/or homogenous and/or linear brightness. A device having an image generation device, image capture device, and correcting device is also disclosed.

Method and device for optically measuring the surface of a measurement object

The disclosure relates to a reference plate for calibrating and/or checking a deflectometry sensor system, said deflectometry sensor system including an image generation device and a capturing device having at least one capturing element, wherein the reference plate includes a reflective surface, and wherein, for the purpose of checking at least one system parameter of said deflectometry sensor system, the reflective surface is provided with a predefined pattern including markings. A corresponding method for calibrating and/or checking a deflectometry sensor system is moreover indicated.

Reference plate and method for calibrating and/or checking a deflectometry sensor system

The invention relates to a method for capturing images of a preferably structured surface of an object, using at least one line-scan camera for scanning the surface, wherein the surface is illuminated in a structured manner and wherein for reconstruction of the surface a time-oriented evaluation and/or spatial evaluation of acquired images is effected optionally taking into account a relative movement between the line-scan camera and the surface. Said method is carried out by a device for capturing images of a preferably structured surface of an object.

Method for capturing images of a preferably structured surface of an object and device for image capture

The aim of the invention is a quick and very precise reconstruction of an object. This is achieved by a device and a method for detecting an image of a preferably structured surface of an object (), comprising at least one pattern projection unit for illuminating the object () and at least one imaging unit () for capturing images of projected patterns. A temporal and/or spatial analysis of received images or image sequences is carried out in order to reconstruct the surface. The at least one pattern projection unit is designed to generate patterns using a diffraction of light on an optical grating. Furthermore, the method for detecting images is characterized in that by using the temporal and/or spatial analysis of the captured images or image sequences, corresponding pixels are ascertained by means of algorithms, said pixels together with an imaging function allowing a triangulation of surface points.

Device and method for detecting an image of a preferably structured surface of an object

A method for calibration of a thickness gauge is provided in which the thickness gauge measures the thickness of a measured object in a stipulated measurement direction with at least one displacement sensor, operating contactless or by scanning, a reference object with known thickness and shape being brought into at least one partial area of the measurement field of the at least one displacement sensor.

Method for calibrating a thickness gauge

A device for the contactless optical determination of the position of an object. In particular, the present invention provides a method and device for the contactless optical determination of the 3D position of an object wherein an image of the object is generated by means of a camera and the 3D position of the object is calculated from the camera image based on the image information about detected geometrical characteristics. Determination of the 3D position of the object includes determination of the 3D position and the 3D orientation of the object.

Method and device for the contactless optical determination of the 3D position of an object

Method and apparatus for optically testing the quality of objects such as silicon wafers which have a circular peripheral edge, wherein light is directed onto the edge region of the object, and the light radiating from the object due to reflection, refraction and/or diffraction is detected by means of a measuring unit which produces an image from the received light. Defects on and/or in the object are identified from the produced image.

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Neuburg am Inn, Germany

Robert Wagner