Graver Technologies, Inc.

Extraction Systems, Inc.

Other

Mykrolis Corporation

Robert W Rezuke

Devon A Kinkead

Oleg P Kishkovich

Kartik Potukuchi

John K Higley

Devon Kinkhead

A filter composition effective in reacting with airborne or gaseous organic impurities, such as formaldehyde. The filter composition is formed from a filter substrate, such as for example, a fibrous web or extruded carbon block, treated with tris-(hydroxymethyl) aminomethane. The unexpected result of this combination is a longer lasting filter capable of adsorbing organic airborne impurities for a much longer period of time than an untreated filter media of the same type. The removal of formaldehyde is presented as an illustrious example.

Treated activated carbon for removal of airborne organic and inorganic contaminants

A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.

Filters employing porous strongly acidic polymers

The invention features a clean room and a chemical air filter suitable for use in the air handling system of the clean room directly upstream of high-efficiency particulate air (HEPA) filters. The chemical filter is of the pleated filter type comprising an air permeable, relatively thick web of non-woven fibrous carrier material of pleated form. The web includes a matrix formed of a large multiplicity of synthetic fibers and is characterized in that activated carbon particles are distributed throughout the web, bound in the interstices of the matrix in a manner preventing loss to the air of particles in quantity substantially detrimental to the performance of the HEPA filter. The activated carbon particles are of the type selected to remove the predetermined gas-phase contaminant from the air from the source. The invention also features a non-off gassing filter casing that may easily be installed into existing clean room air handling systems.

Clean room air filtering

A method of making a high efficiency, low pressure drop, adsorptive, non-woven filter composite is disclosed, comprising a high surface area chemically impregnated adsorbent, and a non-woven carrier material; and a method for forming said composite comprising dry application of the chemically impregnated adsorbent to the non-woven carrier material which is then heated and calendared with or without a cover sheet.

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North Grafton, MA, United States of America

Robert W Rezuke