University of Michigan

Robert W Hower

Richard B Brown

Joseph A Potkay

Edward T Zellers

Changhua Zhan

A microscale collector and injector device comprises a microscale passive pre-concentrator (μPP) and a microscale progressively-heated injector (μPHI). The μPP devices comprises first and second substrate portions, a first collection material, a μPP heater, and an outlet. The first substrate portion defines an array of microscale diffusion channels. The first and second substrate portions cooperate to define a first compartment in fluid communication with the diffusion channels. The first collection material is disposed within the first compartment, at least partially surrounding the outlet. The μPP heater is disposed in thermal communication with the second substrate portion. The μPHI device comprises third and fourth substrate portions, a second collection material, and a plurality of μPHI heaters. The third and fourth substrate portions cooperate to define a second compartment. The second collection material is disposed within the second compartment. The μPHI heaters are disposed in thermal communication with the second compartment.

Microscale collector-injector technologies for passive environmental vapor sampling and focused injection

A microscale collector and injector device comprises a microscale passive pre-concentrator (&#x3bc;PP) and a microscale progressively-heated injector (&#x3bc;PHI). The &#x3bc;PP devices comprises first and second substrate portions, a first collection material, a &#x3bc;PP heater, and an outlet. The first substrate portion defines an array of microscale diffusion channels. The first and second substrate portions cooperate to define a first compartment in fluid communication with the diffusion channels. The first collection material is disposed within the first compartment, at least partially surrounding the outlet. The &#x3bc;PP heater is disposed in thermal communication with the second substrate portion. The &#x3bc;PHI device comprises third and fourth substrate portions, a second collection material, and a plurality of &#x3bc;PHI heaters. The third and fourth substrate portions cooperate to define a second compartment. The second collection material is disposed within the second compartment. The &#x3bc;PHI heaters are disposed in thermal communication with the second compartment.

A micromachined device such as a solid-state liquid chemical sensor for receiving and retaining a plurality of separate liquid droplets at desired sites, a method of making the device and a method of using the device are provided. The technique works for both aqueous and solvent-based solutions. The device includes a substrate having an upper surface, and a first set of three-dimensional, thin film well rings patterned at the upper surface of the substrate. Each of the wells is capable of receiving and retaining a known quantity of liquid at one of the desired sites through surface tension. A method for patterning a membrane/solvent solution results in reproducibly-sized, uniformly-thick membranes. The patterning precision of this method allows one to place the membranes closer together, making the sensors smaller and less expensive, and the uniform film thickness imparts reproducibility to the sensors. The final film thickness can be controlled over a 3 to 50 micron range, and lateral dimensions can be as small as 20 microns using conventional materials. The simple patterning steps can be done on full wafers in a mass fabrication process. A second set of well rings may be photo-patterned at the same time as the first set of well rings to isolate functional groups on top of ion-selective membrane.

Microsensor with a well having a membrane disposed therein

A micromachined device such as a solid-state liquid chemical sensor for receiving and retaining a plurality of separate liquid droplets at desired sites, a method of making the device and a method of using the device are provided. The technique works for both aqueous and solvent-based solutions. The device includes a substrate having an upper surface, and a first set of three-dimensional, thin film well rings patterned at the upper surface of the substrate. Each of the wells is capable of receiving and retaining a known quantity of liquid at one of the desired sites through surface tension. A method for patterning a membrane/solvent solution results in reproducibly-sized, uniformly-thick membranes. The patterning precision of this method allows one to place the membranes closer together, making the sensors smaller and less expensive, and the uniform film thickness imparts reproducibility to the sensors.

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Ann Arbor, MI, United States of America

Robert W Hower