Brooks Automation Gmbh

Other

Brooks Automation Us, LLC

Muratec Automation Co., Ltd.

Robert W Carlson

Radik Sunugatov

Anthony C Bonora

Jeff P Henderson

Brian Compian

Mike Krolak

Joseph John Fatula, Jr

Kevin Tzou

Roumen Iliev Deyanov

Pablo Gonzalez

John Brooks Greene

Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and the substrate processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container for transfer of substrates to and from the at least one substrate cassette container through the transport opening, and selectably variable cassette support purge ports with a variable purge port nozzle outlet, variable between more than one selectable predetermined purge port nozzle characteristics, disposed on the cassette support, each of the more than one purge port nozzle characteristics being configured so that the purge port nozzle outlet with each selected predetermined purge port nozzle characteristic complements and couples to at least one purge port of the at least one substrate cassette container.

Load port module

A substrate loading device including a frame adapted to connect to a substrate processing apparatus, the frame having a transport opening through which substrates are transported to the processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container proximate the transport opening, the support configured so that a sealed internal atmosphere of the container is accessed from the support at predetermined access locations of the container, and the cassette support has a predetermined continuous steady state differential pressure plenum region, determined at least in part by boundaries of fluid flow generating differential pressure, so that the predetermined continuous steady state differential pressure plenum region defines a continuously steady state fluidic flow isolation barrier disposed on the support between the predetermined access locations of the container and another predetermined section of the support isolating the other predetermined section from the predetermined access locations.

An end effector for transferring a tray is described. The end effector includes an end effector base attached to a vertical drive column of a tray engine. The end effector further includes a slide having multiple arms that are attached to the end effector base to support the tray, when present. The arms of the slide enable the tray to slide along a length of the end effector base. The arms face each other and extend along the length of the end effector base.

End effector with slides for transferring trays

Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the loading device and processing apparatus, a cassette support for holding at least one substrate cassette container, and cassette support purge ports with purge port nozzle locations disposed on the cassette support, each nozzle location being configured so that a nozzle at the nozzle location couples to at least one purge port of the substrate cassette container, wherein each nozzle location defines an interchangeable purge port nozzle interface so that different interchangeable purge port nozzles are removably mounted to respective nozzle interfaces of the nozzle locations that correspond to the different nozzle configurations of the interchangeable purge port nozzle modules, in conformance with and effecting coupling to different ports of different substrate cassette containers having different purge port characteristics.

A tray engine includes a vertical drive column, a rotation mechanism for rotating the vertical drive column, and an end effector attached to the vertical drive column. The end effector includes an end effector base attached to the vertical drive column. The end effector further includes a slide attached to the end effector base to support a tray, when present. The slide enables the tray to slide along a length of the end effector base. The tray engine includes a drive mechanism attached to the end effector base for moving along the length of the end effector base to enable the tray, when present, to slide linearly along the length and load or unload the tray to or from the slide.

Wafer tray sorter with door coupled to detector

Tray engine with slide attached to an end effector base

A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.

Buffered storage and transport device for tool utilization

An electronic acceleration/deceleration warning system for a vehicle includes an electro mechanical transducer, for example an arrangement of pendulum, light source and photocells, for converting acceleration or deceleration of the vehicle into an electrical quantity, changing in proportion with the rate of deceleration, an oscillator having a variable frequency output, a circuit connected to the transducer and oscillator for varying the frequency of the oscillator output signal in proportion to the vehicle deceleration, and a pair of warning lamps horizontally displaced on the rear end of the vehicle and connected to the oscillator in a manner such that the lamps flash alternately and at a rate determined by the vehicle deceleration. The warning lamps can also serve as turn indicators for the vehicle. A manually-operated switch has two selectable states corresponding to the two turn directions for the vehicle. A circuit connected to the switch, oscillator and lamps applies a constant frequency signal to either one of the lamps and prevents application of the signal to the other lamp as determined by the manually selected state of the switch. A priority arrangement operative in response to a predetermined level of deceleration prevents disabling of either warning lamp thereby allowing operation of the warning system irregardless of the state or position of the turn selector switch.

Vehicle acceleration/deceleration warning system having turn signal

A compound pendulum allows light to impinge upon properly positioned acceleration or deceleration photocells to vary the resistance of the photocells in accordance with the angular displacement of the pendulum; the amount and direction of angular displacement of the pendulum is dependent on the amount of acceleration or deceleration of the vehicle. Variation of the deceleration photocell resistance varies the frequency of an oscillator circuit to alternately flash a pair of warning lights at a frequency dependent on the rate of deceleration of the vehicle. The acceleration photocell must receive maximum illumination (a threshold value) to actuate a light for warning of a minimum rate of acceleration of the vehicle. A manual switch allows a high flash rate of alternate warning lights to be controlled by the operator of the vehicle. An audio generator produces a continuous tone for acceleration and an interrupted tone for deceleration, the frequency of interruption corresponding to the flash rate of the deceleration warning lights. The system is an aid in preventing rear end collisions and will save gasoline if properly used.

Growing community of inventors

Milpitas, CA, United States of America

Robert W Carlson