International Business Machines Corporation

Robert W Burkhart

Allen Ronald Cox

John D Hartley

The sputter deposition of a thin film of material on both sides of a thin substrate is performed by positioning the substrate sides orthogonal to the target and preferably radial to the deposition center of the sputter system. The vapor deposition of alumina on a thin ferrite core for a magnetic head is accomplished by positioning the ferrite substrate in the vacuum chamber orthogonally to the target and radial to the particle deposition center. The alumina is deposited on both sides of the ferrite core simultaneously to substantially the same thickness. The deposition on both sides of the ferrite core protects the core against width erosion, and minimizes bending stress. In addition, signal output of the ferrite core when used in a magnetic head is increased.

Growing community of inventors

Tucson, AZ, United States of America

Robert W Burkhart