Schmid Silicon Technology Gmbh

G+r Technology Group Ag

Robert Stöcklinger

A reactor that produces polycrystalline silicon using a monosilane process includes a reactor base plate having a multiplicity of nozzles formed therein through which a silicon-containing gas flows, a plurality of filament rods mounted on the reactor base plate, and a gas outlet opening located at a selected distance from the nozzles to feed used monosilane to an enrichment and/or treatment stage, wherein the gas outlet opening is formed at a free end of an inner tube, the inner tube is conducted through the reactor base plate, and the inner tube has an outer wall and an inner wall and thus forms an intermediate space in which at least one cooling water circuit is conducted.

Reactor for producing polycrystalline silicon using the monosilane process

An apparatus and a system for extracting gaseous specimens to be measured, preferably during the production of polycrystalline silicon, are disclosed. The apparatus according to the invention is a flange-like device (), which is placed between each of the at least two pipe sections () of the outlet pipes ().

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Feldkirchen-Westerham, Germany

Robert Stöcklinger