Leybold Vakuum Gmbh

Robert Stolle

Christian Beyer

Heinz-Dieter Odendahl

Dirk Kalisch

Thomas Palten

During the pumping of corrosive gases, it is advantageous to admit a seal gas to endangered pumping chambers at a lower flow rate and a higher pressure than the corrosive gases. Inert gas from a supply ( ) has its pressure reduced by a pressure reducer ( ). An on/off valve ( ) controls a flow of the inert gas through a flow restriction ( ) which restricts the flow of inert gas to appropriate sealing gas rates at an outlet ( ). After pumping the corrosive gas, a control valve ( ) in a bypass line ( ) causes the inert gas to be supplied to the outlet ( ) at a higher flow rate for purging the pump.

Seal-gas valve device

The present invention relates to a friction vacuum pump having at least one turbomolecular pump stage (,) joined at its pressure side to a screw pump stage (,). In order to improve the pump properties it is proposed that a filling stage (,) be arranged between the turbomolecular pump stage (,) and the screw pump stage (,) that has blades (,) whose length corresponds at the suction side to the active length of the blades at the pressure side of the turbomolecular pump stage (,), and at the pressure side to the depth of the suction-side region of the screw (,) of the screw stage (,).

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Kö'ln, Germany

Robert Stolle