Samsung Electronics Co., Ltd.

Samsung Austin Semiconductor, LP

Robert Stebbins

Robert Bell

Rodolfo Martinez

Russell Olson

A stand for a heater pedestal with a base member and a support member detachably coupled to the base member, the support member having a plurality of ring members and at least one spacer member extending vertically from the base member, a ring member separated from another ring member by a spacer member, a ring member having an aperture which extends through the ring member in a horizontal direction, the at least one spacer member forming at least one opening between two corresponding ring members, and the ring member furthest from the base member configured to support a heater pedestal, and the apertures of the ring members of the support member being configured to receive a susceptor of the heater pedestal.

Stable heater rebuild inspection and maintenance platform

A system for use in fabrication of carbon nanotubes (CNTs) includes a wafer having a circuitry and a plurality of CNT seed sites. The system also includes a base assembly configured to support the wafer. The system further includes a first tube disposed over the wafer and configured to surround the CNTs that form on the seed sites. The circuitry in the wafer is configured to conduct at least one static charge. The wafer includes a top surface having a plurality of CNT seed sites, each seed site coupled to the circuitry and configured to receive one of the at least one static charge.

Growing community of inventors

Round Rock, TX, United States of America

Robert Stebbins