Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno

Asml Netherlands B.v.

Robert Snel

Arno Jan Bleeker

Hedser Van Brug

Fokko Pieter Wieringa

Jasper Winters

Marcus Benedictus Hoppenbrouwers

Thomas Liebig

Wouter Andries Jonker

René Kroes

Maarten Kruithof

Rob Lansbergen

Sander Van Der Meer

Peter Van Os

A physical object processing system is described that includes a process station, a transport facility, an optical imaging system, an image sensor and data process facilities. The transport facility transports objects along the process station that performs processing steps to the object. The image sensor acquires a digital image from an optical image of the physical objects provided by the optical imaging system. The data process facilities in turn process the digital image to control the process station. The optical imaging system maps the optical image of the at least one physical object onto the image sensor at an at least substantially fixed position during a time-interval for acquiring the digital image.

Physical object processing system and method

An optical coherence tomography microscopy apparatus () is presented for detecting a three-dimensional image of an optically translucent or reflective sample object (OS), the apparatus comprising an interferometric optical setup including a photo sensor unit (). A sense signal Si from the photo sensor unit () is detected using a detection reference signal. The detection reference signal is derived from a signal indicative for a relative displacement of the sample object (OS) with respect to a reference object.

Optical coherence tomography microscopy apparatus and method for detecting a three-dimensional image of an object

A method of imaging radiation from an object on a detection device. The method includes directing a beam of coherent radiation to the object, scanning the beam of radiation over an angle in or out of a plane of incidence relative to the object, and imaging scattered radiation from the object on the detection device.

Method of imaging radiation from an object on a detection device and an inspection device for inspecting an object

Growing community of inventors

Delft, Netherlands

Robert Snel