Entegris, Inc.

Millipore Corporation

Mykrolis Corporation

Entegris, In.

Robert S Zeller

Christopher J Vroman

Jeffrey J Spiegelman

Joseph Robert Despres

Russell J Holmes

Bipin S Parekh

James T Snow

Walter Plante

Edgar Daniel La Borde

Described are porous sintered metal bodies, methods of making and using the porous sintered metal bodies, and methods of using the porous sintered metal bodies for commercial applications that include filtering a fluid, including in applications requiring high efficiency (high LRV) filtration.

Sintered porous material having nodes and fibers of different materials, with different sintering points, and related methods of preparation and use

A gas supply vessel for storing and dispensing a reagent gas including a filter such that the vessel is capable of delivering the reagent gas, after it is filtered, at a high level of purity. The filter includes a porous sintered body and is effective to provide a desired level of purity of a supplied reagent gas by flowing the reagent gas through the filter during delivery from the vessel at a low pressure, at a relatively low flow rate, and with a relatively low pressure drop across the filter.

Gas supply vessel

A porous membrane, comprising a blend of a first powder of metal particles of the first average size and a second powder of metal particles of a second average size, the first powder and the second powder sintered together. The first average size is five to fifty times greater than the second average size. The porous membrane comprises from 40% to 60% by weight of the first powder.

Sintered porous material comprising particles of different average sizes

A lithographic projection apparatus () includes a support configured to support a patterning device (MA), the patterning device configured to pattern the projection beam according to a desired pattern. The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system () configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system () includes a purge gas mixture generator () configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer () configured to add the moisture to the purge gas and a purge gas mixture outlet () connected to the purge gas mixture generator () configured to supply the purge gas mixture near the surface.

Lithographic projection apparatus, purge gas supply system and gas purging method

The present invention is directed to porous composite materials comprised of a porous base material and a powdered nanoparticle material. The porous base material has the powdered nanoparticle material penetrating a portion of the porous base material; the powdered nanoparticle material within the porous base material may be sintered or interbonded by interfusion to form a porous sintered nanoparticle material within the pores and or on the surfaces of the porous base material. Preferably this porous composite material comprises nanometer sized pores throughout the sintered nanoparticle material. The present invention is also directed to methods of making such composite materials and using them for high surface area catalysts, sensors, in packed bed contaminant removal devices, and as contamination removal membranes for fluids.

Porous sintered composite materials

A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material. The present dendritic particles can be of high purity, and substantially free of carbon contamination.

Method for forming chromium anisotropic metal particles

Method for forming anisotrophic metal particles

Method for forming titanium anisotropic metal particles

Method for forming dendritic metal particles

A high-porosity metallic membrane element comprising a sintered element having at least about 55% porosity, the sintered element comprising a matrix of substantially interconnected pores, each of the pores being defined by a plurality of dendtritic metallic particles. A preferred form is made from pure nickel, preferably filamentous nickel powder. The high-porosity metallic membrane element, comprising the aforementioned sintered element having at least about 55% porosity, can be sealed within a filter housing to produce a highly porous filter device with a filtered fluid flow path through the metal membrane element. Also disclosed is a method of making the high-porosity metallic membrane element which includes depositing by air-laying techniques a substantially uniform low-density bed of a sinterable dendritic material into a mold suitable for applying compressive force thereto, compressing the low-density bed of sinterable dendritic material to form a green form, and sintering the green form. The present filter devices exhibit superior porosity and face velocities, negligible outgassing and limited particle shedding when compared to the devices of the prior art.

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Boston, MA, United States of America

Robert S Zeller