Forschungszentrum Julich Gmbh

Robert Romestain

Hans Luth

Michael Gotz Berger

Michael Kruger

Markus Thonissen

Wolfgang Theiss

Gilles Lerondel

A process for producing a structured area of porous silicon on a substrate, in which silicon is etched and structured by means of illumination, includes selectively aiming the illumination during or after the formation of the porous silicon directly at a selected area of a p-doped substrate in order to effect etching and structuring of the porous silicon in another area. A device for carrying out the process includes an illuminating system for supporting the etching process and for structuring the porous silicon, in which the illuminating system is selectively aimed during or after the formation of the porous silicon directly at a selected area of p-doped substrate in order to effect etching and structuring of the porous silicon in another area.

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St. Mardin d'Heres, France

Robert Romestain