Globalfoundries Inc.

Robert Ringel

Joerg Weigang

Thomas Quarg

Steffen Kalisch

Arndt Herrmann

By defining a section-related WIP limit or a throughput-related WIP limit, an efficient 'look ahead' characteristic may be established to efficiently control the WIP in a complex manufacturing environment, such as a semiconductor facility. The respective critical WIP values may enable efficient reduction of priority of products moving towards an increased WIP queue, thereby reducing or substantially avoiding the release of products that are expected to run into the WIP queue. In this way, the efficiency of shared tools may be increased, since process capacity no longer required for the processing products running into WIP queues may be allocated for other operations.

Method and system for scheduling a stream of products in a manufacturing environment by using process-specific WIP limits

By simulating a manufacturing environment on the basis of appropriate simulation models, a schedule may be established in which process restrictions, tool availability and product entity status are automatically taken into consideration. Moreover, by estimating the process flow efficiency provided by a simulated time progression of the process flow in the environment, an optimized schedule may be established, which may be accomplished by identifying less efficient product entities and re-scheduling one or more product entities in order to obtain an enhanced process flow efficiency. The technique of the present invention may be advantageously applied to the processing of advanced mass products requiring sophisticated process tools and process sequences, such as the processing of semiconductor devices.

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Dresden, Germany

Robert Ringel