International Business Machines Corporation

Other

Stratasys, Inc.

Robert R Jackson

John Samuel Batchelder

Theodore Gerard Van Kessel

Douglas S Goodman

John D Mackay

Huntington W Curtis

Franklin Gracer

Jerry C Shaw

George M Koppelman

Steven J Holmes

Shawn Anthony Hall

Philip C Hobbs

Geoffrey Hale Purdy

William D Hopewell

John L Sturtevant

An improved extrusion-based manufacturing system includes one or more extruders, with each extruder containing at least two stages of increasing pressurization. In a preferred embodiment, a first stage of pressurization is created by the motion of a solid wafer of thermoplastic through an orifice into a heater chamber. In another preferred embodiment, the wafers are stored in removable, electronically tagged, cassettes and are removed therefrom by a stapler mechanism which feeds the wafers from the cassette to a tractor feed mechanism on demand. In each embodiment, a second stage of pressurization is provided by a pump, with the first stage pressurization maintaining a flow of thermoplastic to the pump under all expected pump rates.

Method and apparatus for solid prototyping

In a photolithographic process utilizing a wafer coated with a chemically amplified photoresist, a method for controlling a line dimension. The method comprises the steps of measuring at at least two times, and from at least two angles, evolving signals comprising intensities of light diffracted from a portion of an exposed patterned area on the waver, the evolving signals corresponding to vector combinations of time dependent light diffracted from the pattern appearing in the photoresist; and substantially time invariant light diffracted due to any underlying pattern beneath the photoresist; and, combining the measurements mathematically for extracting a contribution due to the pattern evolving in the photoresist.

Method for controlling a line dimension arising in photolithographic

Disclosed are methods and apparatus for fabricating a three-dimensional object in accordance with a computer-generated definition of the object that is stored within a memory. A method includes the steps of (a) evaluating the stored definition of the object to locate any un-supported features of the object; in response to locating an un-supported feature, (b) defining a support structure for the un-supported feature; (c) generating a fabrication tool movement list expressive of movements required by a fabrication tool to fabricate the object and any defined support structures; and (d) translating the fabrication tool in accordance with the generated fabrication tool movement list to fabricate the object and any defined support structures. The step of translating includes the steps of, generating a feedback signal that is indicative of at least one characteristic of a most recently fabricated portion of the object; and monitoring the feedback signal to detect a deviation of at least a location of the most recently fabricated portion of the object from a corresponding location as expressed in the associated portion of the fabrication tool movement list. Also disclosed are methods and apparatus for anti-aliasing aliased surface features of the object, representing the object definition in a vector format, generating a bit-mapped representation of the object, and an analysis of the definition of the object to identify and subsequently compensate for a region of the object that has a potential to retain heat during fabrication.

Model generation system having closed-loop extrusion nozzle positioning

A rotary viscosity pump is provided that has a housing and an impeller. The housing has a conical chamber with an outlet at a narrow end of the chamber. The impeller has a conical section with a logarithmic spiral groove along its exterior. The spacing between the housing and the impeller can have either a constant gap or a gap that decreases along the length of the impeller. The depth of the groove can be constant, increase, or decrease in depth along the length of the impeller.

Conical logarithmic spiral viscosity pump

Apparatus and method for fabricating a three-dimensional object in accordance with a CAD-generated specification of the object. A closed-loop extrusion system (10) includes a nozzle (12) for extruding a material, such as a hot melt adhesive; apparatus (14, 18, 46) for controllably positioning the nozzle in accordance with the specification; and a sensor (60) for generating a feedback signal that is indicative of at least one characteristic of a most recently extruded portion of the material. Visual and non-visual feedback sensors may be employed, including optical sensors, infrared emission sensors, and proximity detection sensors. The specification of the object is converted to a bit-mapped representation thereof to improve accuracy relative to vector-based representations. Methods for determining a need for supporting structures and anti-aliasing features and for integrating the structures and features into the object specification are also disclosed.

Measurement apparatus and procedure for use with lithographic equipment is provided for the construction of electronic and other devices wherein a photoresist is deposited as a layer upon a substrate. A Nomarski differential interference contrast microscope in conjunction with a scanned image detector is employed to examine verification marks produced by projection of an overlay, such as the mask or reticle, upon the photoresist layer. The projection results in a production of verification marks in the form of a latent image which, while invisible with conventional viewing means, can be viewed by phase-contrast imaging employing differential phase shift. Various characteristics of the resultant image are employed to align secondary verification marks with primary verification marks previously provided on the substrate, and to allow for a checking of line width, dosage, focusing, temperature control, and global alignment. Observation of the photoresist is accomplished with radiation at lower frequency than the exposure radiation, the latter being significantly absorbed, by the photoresist, the photoresist being transparent to the observation radiation to permit reflection from top and bottom surfaces of the photoresist.

Latent-image control of lithography tools

A wheelchair tray assembly is provided which includes spring biased hook elements to secure a tray to the arms of a wheelchair. The tray is mounted to tray supports which permit movement of the tray perpendicular to the direction of movement of the hook elements. The entire unit when collapsed is substantially the same size as a conventional cafeteria tray.

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Millbrook, NY, United States of America

Robert R Jackson