UChicago Argonne, LLC

Robert P Winarski

Deming Shu

Jorg M Maser

Curt Alfred Preissner

Barry Lai

Franz Stefan Vogt

Gregory Brian Stephenson

Martin V Holt

A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.

Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument

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Lockport, IL, United States of America

Robert P Winarski