Mapper Lithography IP B.v.

Asml Netherlands B.v.

Robert Mossel

Kaustubh Prabodh Padhye

Guido De Boer

Stijn Willem Herman Karel Steenbrink

Niels Vergeer

Johnny Joannes Jacobus Van Baar

Eric De Kok

Willem Jacob Vis

Cor Verburg

Cornelis Verburg

Wim Vis

A measurement system for measuring an input electrical current (Ics) from a current source (CS) and generating a current measurement signal, comprising a current measuring circuit () having a first input terminal () connected to the current source and an output terminal () for providing the current measurement signal. The current measuring circuit further comprises one or more power supply terminals () arranged to receive one or more voltages from a power supply (a,b) for powering the current measuring circuit. The current measuring circuit also comprises a first voltage source (VD) coupled to the one or more power supply terminals, the first voltage source providing a disturbance voltage to the one or more power supply terminals, the disturbance voltage representing a voltage at the first input terminal.

Current measurement system

A measurement system for measuring an input electrical current (Ics) from a current source (CS) and generating a current measurement signal, comprising a current measuring circuit () having a first input terminal () connected to the current source and an output terminal () for providing the current measurement signal. The current measuring circuit further comprises one or more power supply terminals () arranged to receive one or more voltages from a power supply () for powering the current measuring circuit. The current measuring circuit also comprises a first voltage source (VD) coupled to the one or more power supply terminals, the first voltage source providing a disturbance voltage to the one or more power supply terminals, the disturbance voltage representing a voltage at the first input terminal.

A capacitive measurement system for generating a measurement signal representative of a measured position or distance to a target. The system has a first circuit comprising a thin film capacitive sensor () arranged for providing a sensor capacitance in dependence on the measured position or distance; a cable () comprising a sensor wire () and a co-axial shield conductor (), the cable having a remote end and a local end, the sensor wire electrically connected to the capacitive sensor at the local end of the cable; a voltage source () having an output terminal connected to the sensor wire at the remote end of the cable and arranged to energize the capacitive sensor, and energize the shield conductor with essentially the same voltage as the sensor wire; and a current measuring circuit () having first and second input terminals and an output terminal, the current measuring circuit connected in series with the first input terminal connected to the output terminal of the voltage source and the second input terminal connected to the sensor wire at the remote end of the cable, the current measuring circuit arranged to measure current flowing in the sensor wire and generate the measurement signal at the output terminal.

Active shield for capacitive measurement system

The invention relates to a lithography system. The lithography system has a projection lens system and a capacitive sensing system. The projection lens system is provided with a final projection lens. The capacitive sensing system is arranged for making a measurement related to a distance between the final projection lens and a target. The capacitive sensing system includes at least one capacitive sensor. Additional, the capacitive sensing system is provided with a flexible printed circuit structure and at least one integrated flex print connector. The at least one sensor is located in the flexible printed circuit structure. The flexible printed circuit structure has a flexible base provided with conductive electrodes for the at least one sensor and conductive tracks. The conductive tracks extend from the electrodes along the at least one integrated flex print connector.

Capacitive sensing system

A capacitive sensing system having two or more capacitive sensors, one or more AC power sources for energizing the capacitive sensors, and a signal processing circuit for processing signals from the sensors. The sensors are arranged in pairs, wherein the one or more AC power sources are arranged to energize a first sensor of a pair of the sensors with an alternating current or voltage 180 degrees out of phase to a current or voltage for a second sensor of the pair of sensors, and wherein a pair of the sensors provides a measuring unit for a single measured distance value, the signal processing circuit receiving an output signal from each sensor of the pair and generating a measured value related to the average distance between the sensors of the pair and the target.

Capacitive sensing system with differential pairs

A capacitive sensing system with a sensor having a thin film structure. The thin film structure includes a first insulating layer and a first conductive film having a sensing electrode formed on a first surface of the first insulating layer and a second conductive film having a back guard electrode. The back guard electrode is formed in a single plane and has a peripheral portion in the same plane, and is disposed on a second surface of the first insulating layer and a first surface of a second insulating layer or protective layer. The peripheral portion of the back guard electrode extends beyond the sensing electrode to form a side guard electrode which substantially or completely surrounds the sensing electrode.

An integrated sensory system for a lithography machine with a projection lens system () for focusing one or more exposure beams onto a target, a moveable table () for carrying the target (), a capacitive sensing system () for making a measurement related to a distance between a final focusing element of the projection lens system () and a surface of a target (), and a control unit () for controlling movement of the moveable table () to adjust a position of the target () based at least in part on a signal from the capacitive sensing system. The capacitive sensing system () has a plurality of capacitive sensors (), each having a thin film structure. The capacitive sensors and the final focusing element () of the projection lens system are mounted directly to a common base (), and the sensors are located in close proximity to an edge of the final focusing element of the projection lens system.

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Capelle a/d Ijssel, Netherlands

Robert Mossel