Commissariat a L'energie Atomique

Other

Agence Nationale De Valorisation De La Recherche (anvar)

Pixel International S.a.

Commissariat L'energie

Robert Meyer

Brigitte Montmayeul

Jacques Duchene

Gilles Delapierre

Michel Borel

Philippe Rambaud

Jean-Francois Boronat

Michel Levis

Jean Dijon

Jean-Frederic Clerc

Jean-Charles Souriau

Thierry Leroux

Hubert Jouve

Robert Baptist

Hubert Grange

Michel Garcia

Richard Pepi

Aim&eacute; Perrin

Pierre Vaudaine

Louis Destannes

Marie-Noelle Semeria

Marie-Dominique Bruni

Francois Levy

Jean-Francedillaois Boronat

Gerard Chauvet

Francis Muller

Ariel Brenac

Jean-François Boronat

Pierre Guyon

Jacques Sztern

Gabor Suran

Michel Tessier

Ramanathan Krishnan

A triode type cathode structure of an FED screen arranged in rows and columns, including a first lower metallization level forming cathodes, an electrical insulating layer, a second higher metallization level forming extraction grids, openings formed in the second metallization level and in the electrical insulating layer, and lines of electron emission arranged in the openings, which lines are parallel to the direction of the rows of the screen.

Triode cathode apparatus and method of making a triode cathode apparatus

A method for manufacturing a triode type cathode structure including depositing and etching: a cathode layer as cathode conductors; a grid layer as grid conductors; an electrical insulation layer and the grid conductors until reaching a resistive layer to provide cavities; and the cathode conductors to have a perforated structure at the intersection of the cathode conductors and grid conductors. Etching the grid conductors and the electrical insulation layer includes: a) depositing a resin layer on the grid layer, b) lithography and development of the resin layer according to a pattern that will form emissive pads, c) etching the grid layer according to the pattern, d) etching the insulation layer subjacent to the grid layer by extending the etching beyond emissive pad patterns, e) etching the grid layer at zones exposed by etching the insulation layer until reaching the resin layer, f) depositing a catalyst layer in openings of the resin layer to form emissive pads at the bottom of the cavities, and g) eliminating the resin layer.

Method for making an emissive cathode

The invention concerns a device comprising at least one field effect electron source within a sealed structure, which encompasses an internal space that contains a reducing gas whose purpose is to prevent oxidation of the emissive material of the electron source, whereby the reducing gas is a gas with the formula NHwhere x=1 or 2 and y=3 or 4, and which is advantageously under a pressure of between 10and 10mbar. It also concerns manufacturing processes for such a device and apparatuses for implementing these processes.

Field emission device using a reducing gas and method for making same

A microtip electron source including at least one electron emission zone composed of a plurality of microtips connected electrically to a cathode conductor. At least one gate electrode is positioned opposite the electron emission zone and pierced with apertures located opposite the microtips, to extract the electrons from the microtips. An emitted electron focusing gate is positioned opposite the gate electrode, and includes an aperture unit including at least one slit located opposite at least two successive microtips. A flat display screen can include such a microtip electron source. Further, a manufacturing process of such an electron source is disclosed.

Electron source with microtips, with focusing grid and high microtip density, and flat screen using same

Display screen comprising a source of electrons with microtips, capable

A vacuum field emitter device is manufactured by assembling elements of the device, including at least one getter, under a vacuum or a controlled atmosphere. The assembly step includes a step in which elements are positioned, an oven drying step and a device sealing step. Each getter is hydrogenated after the oven drying. The manufacturing process has applications in the manufacture of television screens.

Process for manufacturing a vacuum field emitter device containing

An electron collector having an anode constituted by a substrate (21, 40, 41) on which are deposited conductive strips or tracks (23, 43). A dielectric material layer is deposited on at least one of the edges of each conductive strip.

Electron collector having independently controllable conductive strips

A cathodoluminescent anode is formed on an insulating substrate, while on another insulating substrate are formed cathode conductors, an insulating layer, a grid layer used for the formation of grids, holes in the insulating layer and the grid layer and microtips in the holes. Moreover, a thin insulating layer is formed on the grid layer in order to limit the current liable to flow between the anode and the grids. Another thin layer or film is formed on the thin insulating layer that is sufficiently conductive or resistive to prevent disturbance by the thin electrically insulating layer, of the electric field created between the microtips and the grids.

Microtip display device having a current limiting layer and a charge

According to this process a structure is produced comprising an insulating substrate (32), at least one cathode conductor (34), an insulating layer (36), a grid layer (40) and holes (42) are formed through the grid layer and the insulating layer, on the grid layer using a wet chemical deposition method is produced a lift-off layer (44), followed by the deposition on the assembly of an electron emitting material layer (52) and the elimination of the lift-off layer. Application to the manufacture of flat screens.

Process for the production of a microtip electron source

According to this process a structure is produced comprising an insulating substrate (10) carrying at least one cathode conductor (12), an insulating layer (14), a gate layer (16), holes being formed through these layers, level with the cathode conductor. In the holes are formed microtips made from a metallic material by forming a protective insulating layer (50) on the gate layer, forming a chemical deposit (60) of the metallic material at the bottom of the holes until said material overflows therefrom, by eliminating the protective layer and by electrolytically etching the metallic material. Application to the manufacture of flat screens.

A process for the production of microtip electron sources and the products produced thereby. The process includes a first cleaning stage with a first wet chemical cleaning substage and/or a second plasma cleaning substage and a finishing stage using surface etching. A second cleaning stage using a wet chemical cleaning can also be used. The process uses a system of cathode conductors, grids superimposed an intermediate insulator and microtips deposited on the cathode conductors.

Process for the production of a microtip electron source and microtip

A device for sputtering a metallic material on a plate comprises a vacuum chamber provided with a linear conveyor carrying at least one plate, the plate surface to be processed being turned downward. At least two sputtering sources are disposed under the conveyor, perpendicularly to its moving direction. Each source is associated with a collimator. The sputtering sources and their associated collimators are disposed to coat the whole width of the plate.

Device for sputtering a metallic material on a plate

Micropoint emissive cathode electron source and field emission-excited cathodoluminescence display means using said source. The source comprises a series of electrodes (5) acting as cathode conductors and carrying micropoints (12) and a series of electrodes (10g) acting as grids, each of the electrodes of one of the series being in contact with a resistive layer (7) and having a lattice structure, so that there are consequently tracks (5a) which intersect and define first openings (6), each of the electrodes of the other series having second openings (11) which are displaced with respect to the first openings.

Micropoint emissive cathode electron source and field emission-excited

Electron source with microtip emissive cathodes having grating-like electrodes. These electrodes can either be cathode conductors (5) or grids (10). Specific application to the excitation of a display screen.

Electron source with microtip emissive cathodes

Electron source with micropoint emissive cathodes and display means by cathodoluminescence excited by field emission and using said source. Each cathode (5) comprises an electrically conductive layer (22) and micropoints (12) and, according to the invention, a continuous resistive layer (24) is provided between the conductive layer and the micropoints. The display means comprises a cathodoluminescent anode (16) facing the source.

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Saint Nazaire les Eymes, France

Robert Meyer