Helix Technology Corporation

Robert M Patterson

Maureen C Buonpane

Stephen J Yamartino

Allen J Bartlett

Philip A Lessard

Paul E Dresens

Gary S Ash

Michael J Eacobacci, Jr

James A O'Neil

Mark A Stira

Brian D Foley

Philip D Acomb

Alan C Brightman

Timothy M Pulling

In a power failure recovery, the operating state before a power failure and present conditions of a cryopump are determined to initiate a regeneration or startup process. Where the refrigerator was operating before power failure, it is turned on during recovery to condense gases in the cryopump. A startup process is initiated where the cryopump was in a startup process before the power failure and present conditions of the cryopump indicate that the cryopump is sufficiently empty or clean. If the operating state and present conditions indicate that a corrosive or hazardous liquid remains in the cryopump, a regeneration process is initiated. If the cryopump was in a shutdown process before the power failure, the cryopanel of the cryopump is refrigerated to a temperature at which gases sublimate from the cryopanel. The temperature of the cryopanel is then maintained until the gases are removed. A refrigerator having a displacer with variable speed and heaters may be used to control the temperature of the cryopanel. When the cryopump is sufficiently empty, the cryopump is turned off.

System and method for recovering from a power failure in a cryopump

A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator is turned on. If the system fails a rough test after roughing at the lower temperature, it is repurged with the rough valve open.

Purge and rough cryopump regeneration process, cryopump and controller

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Burlington, MA, United States of America

Robert M Patterson