Westinghouse Electric Corporation

Robert M Handy

David L Green

Paul R Malmberg

Donald F Stoneburner

A method is provided for contactless testing of an integrated circuit by fabricating, integrally with the integrated circuit, at least one and preferably a plurality of conductive semiconductor elements that are electrically connected between power and/or signal sources and inputs to the integrated circuit, and that are adapted to electrically conduct when exposed to a radiation beam. The conductive elements are selectively exposed by at least one radiation beam, such as an electron or light beam, to cause the conductive elements to electrically conduct and supply desired electrical inputs at the connected inputs of the integrated circuits; and the electrical responses of at least a segment of the integrated circuit to said electrical input are measured to determine whether said circuit segment possesses specified electrical characteristics. The integrated circuit can thus be selectively and sequentially tested by segments and modules. After testing, the conductive semiconductor elements are preferably disconnected from the integrated circuit, and the integrated circuit selectively connected electrically while accommodating and passivating defective components and modules of the circuit.

Contactless test method for integrated circuits

A method is provided for contactless testing of an integrated circuit by fabricating, integrally with the integrated circuit, semiconductor switch elements, that is, thyristors, transistors and combinations thereof, that are connected to power and/or signal electrical inputs of the integrated circuit. Base regions of the switch elements are selectively exposed to a fine-dimensioned electron beam to switch the elements and supply desired electrical inputs at the connected inputs of the integrated circuit. The integrated circuit can thus be selectively tested preferably by segments and modules. After testing, the switch elements are disconnected from the integrated circuit, and the integrated circuit selectively connected preferably while accommodating and passivating defective components and modules of the circuit.

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Phoenix, AZ, United States of America

Robert M Handy