Raytheon Company

Robert M Emerson

Sean P Kilcoyne

George Grama

Andrew Peter Clarke

Michael V Liguori

June-Marie Boll

A method of forming a pattern of metallic material on a substrate includes providing a plurality of void regions on a surface of the substrate. At a first temperature, a first layer of a first metallic material of a eutectic-forming pair of metallic materials is deposited on the substrate to form a conformal metallic film over the substrate and over the surfaces of the plurality of void regions. The substrate and conformal metallic film are warmed to a second temperature greater than a eutectic-liquid-formation temperature of the eutectic pair of metallic materials. At the second temperature, the second metallic material of the eutectic-forming pair of metallic materials is deposited on the conformal metallic film to initiate a eutectic-liquid-forming reaction, such that the plurality of void regions are filled with a mixture of the first and second metallic materials of the eutectic-forming pair of metallic materials.

Method of filling grooves and holes in a substrate

Systems and methods of in-situ calibration of semiconductor material layer deposition and removal processes are disclosed. Sets of test structures including one or more calibration vias or posts are used to precisely monitor processes such as plating and polishing, respectively. Known (e.g., empirically determined) relationships between the test structure features and product feature enable monitoring of wafer processing progress. Optical inspection of the calibration feature(s) during processing cycles permits dynamic operating condition adjustments and precise cessation of processing when desired product feature characteristics have been achieved.

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Solvang, CA, United States of America

Robert M Emerson