Texas Instruments Corporation

Robert M Boysel

Gregory A Magel

Jeffrey Brian Sampsell

James M Florence

Gregory C Smith

Tsen-Hwang Lin

William E Nelson

Paul M Urbanus

Philip A Congdon

Wen R Wu

A method for printing or exposing photosensitive media is disclosed herein. The method uses standard spatial light modulators with standard addressing circuitry. The data is written to the device for the first row, the photosensitive media is exposed to the light reflected from the device, and the device is turned off. The data from the first row is then written to the second line of the device, and new data is loaded into the first line of the device. The media is again exposed. This is repeated until the entire region of the drum is completely exposed. The device can be repositioned to cover a different region of the drum and the process would be repeated.

Non-systolic time delay and integration printing

A membrane device is provided in which a plurality of ridges (14) and recesses (16) are formed proximate to a substrate (12). Electrodes (18) are formed within the recesses (16). A spacer (20) supports a membrane (22). Application of a potential difference between the membrane (22) and the electrodes (18) allows for deflection of the membrane (22) toward the electrodes (18).

Membrane device with recessed electrodes and method of making

A method of manufacturing an optical waveguide device. The method involves removing a portion of an upper cladding layer 110 from above a waveguide 106 and depositing a temporary spacer layer 114 in place of the removed upper cladding 110. A metal membrane 116 is deposited and patterned over the temporary spacer layer 114 and the temporary spacer 114 is removed, leaving the metal membrane 116 suspended over the waveguide 106. When a voltage differential is applied between the metal membrane 116 and electrodes 108 formed on a lower cladding 102, the metal membrane 116 is collapsed against the waveguide 106, attenuating any light transmitted by the waveguide 106.

Membrane optical waveguide device and method of fabrication

A support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 426, and depositing a metal layer 406 over the support pillar 426 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 432 over the pillars 426. After applying the spacer layer 432, the spacer layer 432 is etched to expose the tops of the pillars.

Support post architecture for micromechanical devices

The present invention provides a method and a circuit architecture whereby a time delay for optical signals in an integrated optical circuit is implemented in a hybrid configuration. For example, a hybrid time delay circuit could be implemented with a three chip set composed of a switch chip 34 placed between two delay chips 36,38. The delay chips may include one or more delay loops 44 and preferably an associated bypass loop for each delay loop 42. The switch chip contains an optical switch 20 for each delay loop on the delay chips and may contain switch control circuitry or an interface to external switch control circuitry.

Hybrid architecture for integrated optic switchable time delay lines and

A spatial light modulator (40,70,80,90,130) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) and which may be hexagonal (92, 132) is supported by a torsion hinge (44,86,94) ends along a torsion axis. A plurality of flexure hinges (48,82,106) are provided to support the ends of the mirror (42,72,92,132) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60,96,98). The hexagonal mirrors (92,132) allow a tightly packed mirror array, and have a closely circular surface area so as to efficiently reflect a light beam of circular cross section, such as a light beam from fiber optics.

Optical switch having an analog beam for steering light

Support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 426, and depositing a metal layer 406 over the support pillar 426 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 432 over the pillars 426. After applying the spacer layer 432, the spacer layer 432 is etched to expose the tops of the pillars.

A spatial light modulator (40, 70, 80) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) is supported by a torsion hinge (44) along a torsion axis. A plurality of flexure hinges (48) are provided to support the corners of the mirror (42, 72) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60).

Spatial light modulator having an analog beam for steering light

A method of immobilizing both (i) a semiconductor wafer (16) during the sawing thereof to form individual chips (18) and (ii) the resulting chips (18) as and after sawing of the wafer (16) is completed. A negative pressure is applied to the wafer (16) through a wafer carrier (12) to immobilize the wafer and individual chips. The negative pressure is applied to the wafer via ports (30) in alignment with the location of each chip (18) to be formed. A grid (40) or negative pressure is used to restrain the chips as they are subsequently transported following sawing.

Methods of and apparatus for immobilizing semiconductor wafers during

An accelerative force may be measured using a plurality of deflection elements (102), each deflection element (102) comprising an inertial mass (104), and at least one hinge (104) supporting the inertial mass (104) in a normal position. Application of a force to inertial mass (104) will result in the deflection of the inertial mass (104) in a first direction out of the normal position. The movement of the inertial mass (104) from the normal position stores energy in the hinges (108) which tends to move the inertial mass (104) in a second direction back to its normal position. Either the mass of the inertial mass (104), or the compliance of the hinges (108) is varied from one deflection element (102) in the array to another so that the force applied to the inertial masses (104) by simultaneous acceleration of the deflection elements (102) deflects some of the inertial masses (104). A detection means (112) senses if inertial masses (104) have deflected and produces an output representative of the applied force.

Micro-machined accelerometer array with shield plane

Digital flexure beam accelerometer and method

Acceleration is measured using an array of micro-machined elements. The array is configured so each successive element is deflected by a higher acceleration. For each acceleration there will be a set of elements that is deflected. By determining the transition point between deflected and undeflected elements, the acceleration can be measured.

Digital flexure beam accelerometer

It is possible to utilize changes in the complex effective refractive index caused by bringing a metal membrane in close proximity to the core of an optical waveguide to form many devices. The invention described herein provides structures and processes that do so, the structure comprising a substrate, a lower cladding, a waveguide core, a removable upper cladding which supports a metal membrane, and an electrode for deflecting said membrane. Switchable devices using this structure include, but are not limited to, polarizers, mode converters, optical switches, Bragg devices, directional couplers and channel waveguides.

Integrated-optic waveguide devices and method

It is possible to determine acceleration using an array of micro-machined elements. The invention described herein details how to do so by fabricating an array of structures with a substrate, addressing circuitry, a spacer layer forming a well over the addressing circuitry, and a deflection element over the well. The deflection elements are configured so each element is deflected by a higher acceleration. The invention also shows one embodiment of the invention.

Growing community of inventors

Plano, TX, United States of America

Robert M Boysel