Ilc Data Device Corporation

Robert Lieberman

Daniel Epstein

An opto-video inspection system for inspecting and examining miniaturized solid-state devices, such as hybrids. An XY table simultaneously positions a known good device and a device to be inspected under respective stereo-zoom microscopes. A TV camera is coupled to each microscope. The XY table, under microprocessor control, is manipulated to select the 'target' or wire bond to be viewed. The selected sites may be simultaneously viewed upon a split screen video display or, alternatively, either the known good device or the device being inspected may be separately viewed through the associated stereo-zoom microscope or on the video screen. Dwell time at each site is computer selectable, as is the sequencing of sites to be viewed. Defective bonds, imperfections or other conditions are permanently recorded through a printer which automatically associates the code printed thereby with the site in view at that time. An operator keyboard permits completed program steps to be recalled for review or for reprogramming, if desired. The known good device may be replaced by either a video tape or video disc containing a record of each site to be examined or, alternatively, a strip of photographic film, each site being selected by the microprocessor in accordance with the site of the device under inspection presently being examined.

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Bethpage, NY, United States of America

Robert Lieberman