Newport Fab, LLC

Rockwell International Corporation

Robert L Zwingman

Paul D Hurwitz

Marco Racanelli

Keh-Fei C Chi

Karen A Reinhardt

Yau-Wai D Chan

Rebecca Y Tang

Patricia C Elkins

Provided is a structure for improved electrical signal isolation between adjacent devices situated in a top semiconductor layer of the structure and a method for the structure's fabrication. The structure comprises a gate situated on the top semiconductor layer, the top semiconductor layer situated over a base oxide layer, and the base oxide layer situated over a handle wafer. The top surface of the handle wafer is amorphized by an inert implant of Xenon or Argon to reduce carrier mobility in the handle wafer and improve electrical signal isolation between the adjacent devices situated in the top semiconductor layer.

Selective amorphization for signal isolation and linearity

A disclosed embodiment is a semiconductor on insulator (SOI) structure comprising a buried oxide layer over a bulk semiconductor layer, and a device layer over the buried oxide layer. At least one transistor is fabricated in the device layer, wherein a source/drain junction of the transistor does not contact the buried oxide layer, thereby causing the source/drain junction to have a source/drain junction capacitance. The SOI structure also comprises at least one trench extending through the device layer and contacting a top surface of the buried oxide layer, thereby electrically isolating the at least one transistor. In one embodiment the at least one trench is formed after fabrication of the at least one transistor and is filled with only dielectric. In one embodiment, one or more wells may be formed in the device layer. In one embodiment the bulk semiconductor layer has a high resistivity of typically about 1000 ohms-centimeter or greater.

Semiconductor on insulator (SOI) structure with more predictable junction capacitance and method for fabrication

Disclosed is a structure for improved electrical signal isolation between adjacent devices situated in a top semiconductor layer of the structure and an associated method for the structure's fabrication. The structure comprises a first portion of a trench extending through the top semiconductor layer and through a base oxide layer below the top semiconductor layer. A handle wafer is situated below the base oxide layer and a second portion of the trench, having sloped sidewalls, extends into the handle wafer. The sloped sidewalls are amorphized by an implant, for example, Xenon or Argon, to reduce carrier mobility in the handle wafer and improve electrical signal isolation between the adjacent devices situated in the top semiconductor layer.

SOI structure and method for utilizing trenches for signal isolation and linearity

SOI structure for signal isolation and linearity

Selective amorphization for electrical signal isolation and linearity in SOI structures

Disclosed are a structure for electrical signal isolation between adjacent devices situated in a top semiconductor layer of the structure and an associated method for the structure's fabrication. The structure includes a trench extending through the top semiconductor layer and into a base oxide layer below the top semiconductor layer. A handle wafer is situated below the base oxide layer and a void is disposed in the handle wafer below the trench. A bottom opening of the trench connects the main body of the trench with the void forming a continuous cavity including the main body, the bottom opening of the trench, and the void such that the void improves electrical signal isolation between the adjacent devices situated in the top semiconductor layer. Unetched portions of the handle wafer are then available to provide mechanical support to the top semiconductor layer.

Electrical signal isolation in semiconductor structures

Electrical signal isolation and linearity in SOI structures

A disclosed embodiment is a switching circuit including a number of transistors fabricated in a device layer situated over a buried oxide layer and a bulk semiconductor layer. Each transistor has a source/drain junction that does not contact the buried oxide layer, thus forming a source/drain junction capacitance. The disclosed switching circuit also includes at least one trench extending through the device layer and contacting a top surface of the buried oxide layer, thus electrically isolating at least one of the transistors in the switching circuit so as to reduce voltage and current fluctuations in the device layer. The disclosed switching circuit may be coupled to a power amplifier or a low noise amplifier and an antenna in a wireless communications device, and be controlled by a switch control signal in the wireless communications device.

Semiconductor on insulator (SOI) switching circuit

A method of providing a planar or iso-planar surface to the interlevel dielectric layer between metal layers of a multilevel MOS wafer includes applying a first dielectric over the first metal layer, applying a layer of spin-on glass over the first dielectric layer, etching the spin-on glass layer in an etch process in which the rate of etch of the spin-on glass is approximately the same as the rate of etch of the first dielectric to reveal at least a portion of the first dielectric layer. A second dielectric layer is placed over the surface of the first dielectric. Vias may then be defined through the dielectric layers, and the second metal layer may be applied over the relatively smooth surface of the second dielectric layer.

Growing community of inventors

Walnut, CA, United States of America

Robert L Zwingman