Asml Netherlands B.v.

Cubic Corporation

Robert L Morse

Alexander Igorevich Ershov

Mahyar Dadkhah

Silvia De Dea

Michael Varga

William N Partlo

Tony Maryfield

Christopher Paul Pate

John McCague

A carrier holds an extreme ultraviolet light source collector mirror. The carrier includes a front panel having an inner surface and an outer surface opposite the inner surface, and defining a through opening that has an edge having a plurality of scallops; a back panel having an inner surface that faces the front panel and an outer surface opposite the inner surface; and a plurality of posts that are configured to connect the back panel to the front panel and to sandwich a flat rim around the circular boundary of the collector mirror between the inner surface of one of the panels and flanges of the posts. The scallops are positioned around a circumference of the edge and being separated by arcs, where the arcs define a circle that has a diameter that is less than a diameter of the circular boundary of the reflective surface of the collector mirror.

Light collector mirror carrier

A system for mounting liquid cooled electrical components includes a plastic chassis having a plurality of mounting sites. The plastic chassis defines at least one fluid circuit that extends through at least a portion of a length of the plastic chassis. The at least one fluid circuit includes an inlet configured to receive a cooling fluid from a fluid source, an outlet configured to return the cooling fluid to the fluid source, and at least one fluid channel extending between the inlet and the outlet. The system also includes a plurality of electrical components. Each of the plurality of electrical components is coupled with one of the plurality of mounting sites. Each of the plurality of mounting sites is in contact with the at least one fluid channel.

Plastic chassis for liquid cooled electronic components

Techniques are disclosed for laser-based target locating for measuring and displaying absolute coordinates (e.g., Global Positioning System (GPS) coordinates) for a target. Techniques include determining absolute coordinates of a laser-based target locator, and using range and other measurements (e.g., compass heading, tilt, and/or the like) to determine the absolute coordinates of a target. The laser-based target locator can then display the absolute coordinates to a user. Sensors providing the other measurements may be calibrated by first determining the absolute coordinates of an optical tag, which may be optically communicated to the laser-based target locator.

Hand-held target locator

A collector mirror of an extreme ultraviolet light source is cleaned by removing the collector mirror from a chamber of the extreme ultraviolet light source; mounting the collector mirror to a carrier; inserting the carrier with the collector mirror into a cleaning tank; applying a cleaning agent to a reflective surface of the collector mirror by spraying the cleaning agent through a plurality of nozzles directed toward the collector mirror reflective surface until the collector mirror reflective surface is clean; rinsing the applied cleaning agent from the collector mirror reflective surface; and drying the collector mirror reflective surface.

Light collector mirror cleaning

Devices are described herein which may comprise an optic having a non-planar surface, the non-planar surface having an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.

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Vista, CA, United States of America

Robert L Morse