Neocera, Inc.

Solid State Measurements, Inc.

Robert L Moreland

Vladimir Vladimirovich Talanov

Hans M Christen

Andrew R Schwartz

Andre Scherz

A measurement technique based on a microwave near-field scanning probe is developed for non-contact measurement of dielectric constant of low-k films. The technique is non-destructive, non-invasive and can be used on both porous and non-porous dielectrics. The technique is based on measurement of resonant frequency shift of the near-field microwave resonator for a plurality of calibration samples vs. distance between the probe tip and the sample to construct a calibration curve. Probe resonance frequency shift measured for the sample under study vs. tip-sample separation is fitted into the calibration curve to extract the dielectric constant of the sample under study. The calibration permits obtaining a linear calibration curve in order to simplify the extraction of the dielectric constant of the sample under study.

Method and system for measurement of dielectric constant of thin films using a near field microwave probe

A probe for non-destructive determination of complex permittivity of a material and for near field optical microscopy is based on a balanced multi-conductor transmission line structure created on a dielectric substrate member which confines the probing field within a sharply defined sampling volume in the material under study. A method for manufacturing dielectric support member based probes includes anisotropically depositing a 50-100 &#x212b; thick underlayer of Cr, Ni, W or Ta onto the dielectric support member, anisotropically depositing conductive material onto the Cr, Ni, W or Ta underlayer, and removing the unwanted conductive material at the sides of the dielectric support member to electrically isolate the created conductive strips.

Apertured probes for localized measurements of a material's complex permittivity and fabrication method

A method for measuring a material's complex permittivity is provided where a near-field microwave probe is positioned a predetermined distance from a first and a second standard sample for measuring a relative resonant frequency shift of the near-field microwave probe for standard samples. Based on measurements, calibration coefficients are calculated. A relative resonant frequency shift of the near-field microwave probe for a sample under study is measured by fast frequency sweep technique while the distance between the tip of the probe and the sample under the study is maintained nominally at the distance between the tip of the probe and each standard sample during a calibration procedure by a shear-force based distance control mechanism. Also, the change in the quality factor of the probe for unloaded and loaded resonator is measured. The dielectric constant of the sample under study is calculated using the resonant frequency shift and the change in the quality factor of the near-field microwave probe for the sample under study and the calibration coefficients obtained during the calibration procedure.

System and method for quantitative measurements of a material's complex permittivity with use of near-field microwave probes

A probe for non-destructive determination of complex permittivity of a material and for near field optical microscopy is based on a balanced multi-conductor transmission line structure created on a dielectric substrate member which confines the probing field within a sharply defined sampling volume in the material under study.

An apparatus for localized measurements of complex permittivity of a material is provided. A probe ( ) analyzes the complex permittivity of a sample ( ), the probe ( ) having a balanced two conductor transmission line ( ) formed of conductive segments ( and ). A probing end ( ) of the transmission line ( ) is brought within close proximity of sample ( ) and an opposite end ( ) of the transmission line is connected to a terminating plate ( ) to form a resonator structure ( ) for measurement of the complex permittivity of sample ( ).

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Lothian, MD, United States of America

Robert L Moreland