The Perkin-elmer Corporation

Etec Systems, Inc.

Robert L Dean

Lee H Veneklasen

Lydia J Young

John W Vorreiter

A non-contact method of cleaning a surface comprising forming a thin gas film (10) of high velocity gas between a surface (14) to be cleaned and a cleaning device (16). The gas film (10), being also a gas bearing, supports the cleaning device (16) and thus forms a self-regulating gap (G) between the surface (14) and the cleaning device (16) so that the cleaning device (16) never contacts the surface (14). The cleaning device (16) comprises a plurality of bores (22) for directing gas onto the surface (14) and an opening (24) for vacuum. In the preferred embodiment, the bores (22) are arranged in a circle and the opening (24) is located centrally of the circle. The thickness of the gas film (10) is determined by the pressure of the incoming gas and vacuum. The creation of turbulence and eddy currents and the use of an ionized gas are enhancements to the cleaning ability of the gas film (10). The method includes moving the cleaning device (16) relative to the surface (14) and vice versa.

Non-contacting method of cleaning surfaces with a planoar gas bearing

Disclosed are passive electrostatic particle collectors (10 & 12) for use in vacuum chambers (24 & 32) especially for a particle beam machine system (30 & 36) to collect particulates, such as dust and debris, generated by moving parts (16) within such chambers (24 & 32). These electrostatic particle collectors (10 & 12) comprise Tourmaline crystals (12) mounted on a bracket plate (10) and strategically located where dust and debris are generated. Also disclosed is a method of removing particulate material in vacuum chambers generated by moving parts by passive electrostatic particle collectors.

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Castro Valley, CA, United States of America

Robert L Dean