Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Von Ardenne Asset Gmbh &Co. Kg (1 from 29 patents)
1 patent:
1. 10770324 - Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate