Polytec Gmbh

Technische Universität Clausthal

Robert Kowarsch

Christian Rembe

Matthias Schussler

Alexander Drabenstedt

Alexander Dräbenstedt

Wanja Ochs

Matthias Schüssler

Fangjian Wang

A device for the interferometric measuring of an object, including a light source to generate an emitted beam, a beam splitting device for splitting the emitted beam into a measuring beam and at least first and second reference beams, an optic interference device, and first and second detectors, with the interference device and the first detector being embodied cooperating such that the measuring beam, at least partially reflected by the object, and the first reference beam are interfered on at least one detector area of the first detector. The interference device and the second detector are embodied cooperating such that the measuring beam, at least partially scattered by the object, and the second reference beam are interfered on at least one detector area of the second detector. A method is also provided for the interferometric measuring of an object.

Interferometric measuring device with detectors set at different angular ranges

Growing community of inventors

Waldbronn, Germany

Robert Kowarsch