Honeywell International Inc.

Other

Honeywell G.m.b.h.

United States of America As Represented by the Secretary of the Air Force

Robert Jon Carlson

Daniel W Youngner

James F Detry

Thomas E Nohava

Michael D Grimm

Paulette S Shelburne

Embodiments described herein provide for a sensing device including a sensor die attached to a header. The header has a first working surface composed of a first one or more electrically conductive pads and a bulk of the header. The sensor die has a second working surface and a third surface reverse of the second working surface. The sensor die includes a sensing element on the second working surface, and the third surface of the sensor die is composed of a second one or more electrically conductive pads and a dielectric layer. The first one or more electrically conductive pads of the header contact the second one or more electrically conductive pads of the sensor die, and the bulk of the header at the first working surface of the header contacts the dielectric layer of the third surface of the sensor die.

Fluid sensor with backside of sensor die contacting header

The invention is directed to a patterned aerogel-based layer that serves as a mold for at least part of a microelectromechanical feature. The density of an aerogel is less than that of typical materials used in MEMS fabrication, such as poly-silicon, silicon oxide, single-crystal silicon, metals, metal alloys, and the like. Therefore, one may form structural features in an aerogel-based layer at rates significantly higher than the rates at which structural features can be formed in denser materials. The invention further includes a method of patterning an aerogel-based layer to produce such an aerogel-based mold. The invention further includes a method of fabricating a microelectromechanical feature using an aerogel-based mold. This method includes depositing a dense material layer directly onto the outline of at least part of a microelectromechanical feature that has been formed in the aerogel-based layer.

Aerogel-based mold for MEMS fabrication and formation thereof

A sensor is provided. The sensor includes a conductive substrate having side-walls; a dielectric layer overlaying a first surface of the conductive substrate, the dielectric layer including a gate dielectric having a first thickness and a field dielectric having a second thickness; a sensing layer overlaying a first surface of the gate dielectric; a non-conductive carrier wherein a second surface of the conductive substrate overlays a portion of the non-conductive carrier; and an insulating layer conformally coating at least the side-walls of the conductive substrate, wherein a first surface of the sensing layer is uncoated by the insulating layer.

Preventing stray currents in sensors in conductive media

Aerogel-bases mold for MEMS fabrication and formation thereof

A steerable projectile comprises a pressure chamber to hold gas in a pressurized state; and a body section coupled to the pressure chamber, the body section having a flight system to use the pressurized gas for adjusting a trajectory of the projectile. The pressure chamber comprises an orifice in a wall of the pressure chamber; and a check valve corresponding to the orifice, the check valve configured to allow gas that results from ignition of a propellant to enter the pressure chamber via the corresponding orifice and to prevent the gas, once inside the pressure chamber, from exiting the pressure chamber via the corresponding orifice.

Steerable projectile charging system

Systems and methods are operable to focus light. An exemplary embodiment has a MEMS substrate, a first cylindrical lens having a first cylindrical surface, and a second cylindrical lens having a second cylindrical surface that is oriented perpendicular to the first cylindrical surface. Light passing through the first and second cylindrical lenses is focused.

Systems and methods for micromachined cylindrical lenses

A cylindrical cam apparatus attached to the lower hinge of an automobile door; adjusted as such to automatically spread the hinge leaves apart during closing thereof, thus compensating for hinge assembly wear, restoring smooth and complete latching function of vehicle door.

Vertical pin automobile door hinge wear compensator

Methods and structural configurations of modular barrier systems and cutoff walls used to isolate contaminated soils from the environment in situ. The cutoff walls comprise plastic sheets, preferably of high density polyethylene, inserted in or adjacent to dense soil (such as bentonite modified) walls, and they are connected to each other with tubular connectors having flaps to which the plastic sheets are connected, preferably by welding.

Cutoff wall system to isolate contaminated soil

To provide for improved uniformity of photoresist developing of silicon wafers, developer solution is injected via an inlet port through a set of holes in a surface in a chuck and distributed across the wafer thereby developing the wafer pattern. A second set of holes in the same surface of the chuck act as exhaust outlets for the used developer. An end point detector is associated with an outlet duct. This design provides great uniformity potential since it is a single wafer system, and the holes and fluid flows can be adjusted as needed. Also, this design requires minimum developer volume which means end point detection can take place using the waste developer at the outlet. Test such as optical density or color, PH or normality, density, or others can detect photoresist content in effluent to determine completion.

Silicon wafer photoresist developer

Thin films of chromium/silicon/nitrogen are etched in a solution of HF, H.sub.2 O.sub.2, HCl, and H.sub.2 O.

Wet chemical etching of crxsiynz

A method of etching a thin film containing chromium using fluorine or a fluorine containing compound without leaving an electrically conductive residue is described.

Growing community of inventors

Brooklyn Park, MN, United States of America

Robert Jon Carlson