Oerlikon Leybold Vaccum Gmbh

Leybold Gmbh

Oerlikon Leybold Vacuum Gmbh

Robert Jenkins

Peter Birch

Thomas Dreifert

Wolfgang Giebmanns

Roland Müller

Clive Tunna

Magnus Janicki

A dry vacuum pump, comprising a pump housing, which forms a plurality of suction chambers, wherein rotor elements are arranged in the suction chambers, in order to convey a pump medium from a high-vacuum-side inlet to an outlet. At least one rotor element is arranged in each suction chamber. The rotor elements are connected to a rotor shaft. The rotor shaft is supported by bearings, wherein a high-vacuum-side bearing is arranged in a cut-out. A sealing device is arranged between the high-vacuum-side bearing and at least one suction chamber adjacent to the high-vacuum-side bearing. The cut-out is connected, by means of a first channel, to a region of the dry vacuum pump in which there is a higher pressure than in at least one suction chamber adjacent to the high-vacuum-side bearing.

Dry vacuum pump with pressurized bearing and seal

A Roots pump comprises a plurality of multi-toothed rotary pumps, each forming a pump stage, and connection channels connecting respective adjacent pump stages. The invention provides that the connection channels are arranged in partitioning walls separating the adjacent pump stages.

Roots pump connection channels separating adjacent pump stages

A vacuum pump comprises pumping elements arranged in a pumping chamber. An electric motor drives the pumping element. A frequency inverter is provided for changing the rotational speed of the electric motor. The frequency inverter is arranged in a frequency inverter housing immediately connected to the pump housing. An air cooler and a liquid cooler are arranged in the frequency inverter housing to cool the frequency inverter.

Vacuum pump

A screw vacuum pump, in particular for compression against atmospheric pressure, comprises a pump housing defining a suction chamber. Two meshing screw rotors are arranged in the suction chamber. Further, an overpressure outlet provided, which comprises an overpressure opening in a side wall of the suction chamber. Further, an overpressure valve is arranged in the overpressure outlet. The width (b) of the overpressure opening in the longitudinal direction of the screw rotors is smaller than or equal to a tooth width (B) of the screw rotors.

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Sussex, United Kingdom

Robert Jenkins