Zygo Corporation

Brown University

Rudolph Technologies, Inc.

Vinestone Corporation

Robert J Stoner

Peter J De Groot

Xavier Colonna De Lega

Humphrey J Maris

Gregg M Gallatin

Michael J Darwin

Christopher J Morath

Robert L S Devine

A method is disclosed which includes: using a scanning interferometry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.

Interferometry for lateral metrology

Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.

Interferometer and method for measuring characteristics of optically unresolved surface features

Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.

A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.

Profiling complex surface structures using scanning interferometry

A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to each of the models of the test object.

A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.

Profiling complex surface structures using height scanning interferometry

An apparatus for improving the signal to noise ratio of measurements of the thickness of layers in a thin film stack uses a photoacoustic measurement system that includes a time differentiation system for inducing a delay in pump beam pulses. The time differentiation system uses, among other things, a birefringent element and other elements to control the polarization of pump beam pulses. Use of the apparatus involves applying a time varying voltage to an electro-optic modulator driver and setting a time differentiation step; or, in another embodiment, applying a time varying voltage to an electro-optic modulator to induce a fixed time delay delta-t between a vertically polarized pulse and a horizontally polarized pulse. The high frequency operation of the system provides for improved determinations of film thickness.

Method and apparatus for increasing signal to noise ratio in a photoacoustic film thickness measurement system

A data processing system includes a network containing of a set of connected devices, where individual ones of the connected devices include a data processor that executes a program for connecting to and disconnecting from the network and for maintaining a first list descriptive of other connected devices and a second list descriptive of at least some user-defined services published by individual ones of publisher connected devices that form a first sub-set of the connected devices. Individual ones of the publisher connected devices maintain a third list descriptive of an individual one or individual ones of registered service subscriber connected devices that form a second sub-set of connected devices. The publisher connected devices provide a service output to registered service subscriber connected devices upon an occurrence of at least one predetermined triggering event, which may be a push trigger, a pull trigger, or a combination of push and pull triggers. A given one of the connected devices may be a member of only the first sub-set of connected devices, or may be a member of only the second sub-set of connected devices, or may be a member of both the first sub-set of connected devices and the second sub-set of connected devices. The set of connected devices are logically organized into a plurality of clusters each having a top level connected device (TLCD), where the plurality of TLCDs are coupled together in a ring for propagating system administration information between the plurality of clusters. Services remain operative even after the connected device on which they initially reside becomes inoperative. This is accomplished by migrating the publication function to at least one other connected device when a current publisher's connected device becomes inoperative for any reason. A backup of last resort is referred to as a persistent connected device.

System and methods providing automatic distributed data retrieval, analysis and reporting services

Disclosed is a system for the characterization of thin films and interfaces between thin films through measurements of their mechanical and thermal properties. In the system light is absorbed in a thin film or in a structure made up of several thin films, and the change in optical transmission or reflection is measured and analyzed. The change in reflection or transmission is used to give information about the ultrasonic waves that are produced in the structure. The information that is obtained from the use of the measurement methods and apparatus of this invention can include: (a) a determination of the thickness of thin films with a speed and accuracy that is improved compared to earlier methods; (b) a determination of the thermal, elastic, and optical properties of thin films; (c) a determination of the stress in thin films; and (d) a characterization of the properties of interfaces, including the presence of roughness and defects.

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Duxbury, MA, United States of America

Robert J Stoner