Rudolph Technologies, Inc.

Air Products and Chemicals, Inc.

Technip Benelux B.v.

Robert Gregory Wolf

Christopher J Morath

Robin Mair

Michael Kotelyanskii

Joseph Perry Cohen

Xianming Jimmy Li

Reed Jacob Hendershot

Jeffrey Kloosterman

Lucas A White

Izaak Risseeuw

Franciscus Arnoldus Maria Jeunink

Jeffrey William Kloosterman

Izaak Jacobus Risseeuw

The invention relates to a process for fueling of vehicle tanks with compressed hydrogen comprising splitting ammonia into hydrogen and nitrogen in an ammonia cracking unit, compressing the hydrogen from the ammonia cracking unit, and dispensing the compressed hydrogen to the vehicle tanks in a hydrogen fueling unit comprising one or more dispensing units, wherein chilled ammonia is used to cool the compressed hydrogen before being dispensed to the vehicle tanks by heat exchange between the compressed hydrogen and the chilled ammonia so that the chilled ammonia is heated, and transferring the heated ammonia to the ammonia cracking unit.

Process for fueling of vehicle tanks with compressed hydrogen comprising heat exchange of the compressed hydrogen with chilled ammonia

A burner apparatus () includes a fluid-based flame stabilizer for discharging a stabilized flame therefrom, a burner tile (), and fuel lances associated with the burner tile. Each of the fuel lances has a discharge nozzle (). A Coanda feature () having a Coanda surface directs a portion of the stabilized flame from the passage defined by the burner tile at the discharge end of a primary flow passage () toward at least one first fuel lance of the plurality of fuel lances to cross light the at least one first fuel lance. In another embodiment, a method of combustion includes supplying a first gaseous fuel to fuel lances of a burner apparatus and igniting and sustaining combustion of a gaseous fuel by cross lighting at the discharge nozzles of the fuel lances by flow from the fluid-based flame stabilizer along a Coanda surface of a Coanda feature toward the discharge nozzles.

Burner apparatus and method of combustion

A system for monitoring thin-film fabrication processes is herein disclosed. Diffraction of incident light is measured and the results are compared to a predictive model based on at least one idealized or nominal structure. The model and/or the measurement of diffracted incident light may be modified using the output of one or more additional metrology systems.

Multiple measurement techniques including focused beam scatterometry for characterization of samples

An optical system includes both a microspot broadband spectroscopic ellipsometer and a photoacoustic film thickness measurement system that are supplied laser light by the same laser light source. One of the systems makes a measurement, the result of which is used to adjust a parameter of the other system; e.g. the ellipsometer measures thickness and the photoacoustic system uses the thickness result to measure the speed of sound. In one version, the ellipsometer converts the laser beam to a broad-spectrum beam that provides higher intensity.

Metrology system with spectroscopic ellipsometer and photoacoustic measurements

A photoacoustic system with ellipsometer, where the ellipsometer includes a laser light source for generating an incident beam, an element for focusing the incident beam on a sample, a unit for measuring the change in amplitude of the incident beam on reflection and a unit for measuring the phase difference of the incident beam on reflection. The system further includes an element to convert an input narrow spectrum beam generated by the laser light source to a broadband sample measurement beam that is focused onto the sample.

An automated metrology system for photoacoustic measurement of single or multi-layer films, and a method of making the system, are disclosed. Dramatic improvements in the cost of ownership of the system is attained by making the system scalable from a system having a single metrology sub-system for making measurements, to a system having two, vertically stacked metrology sub-systems for making independent measurements. A front end of the system for storing multiple cassettes comprises a robot having vertical travel capable of transferring cassettes to and from each of the first and second metrology sub-systems in the case the system is expanded. The two metrology sub-systems are preferably identical and share much of the optics, a computer as well as the front end of the system. Throughput of the dual system is 1.75-2 times greater than that of a single tool metrology system while the cost is substantially less than two complete single tool metrology systems.

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Hackettstown, NJ, United States of America

Robert Gregory Wolf